The objective of this study is to investigate the influence of process parameters, such as power of laser, cutting speed of laser and material thickness, on the practical cutting region and the kerfwidth for the case of cutting of CSP 1N sheet using high power Nd:YAG laser in continuous wave(CW) mode. In order to obtain the practical cutting region and the relationship between process parameters on the kerfwidth, several laser cutting experiments are carried out. The effective heat input is introduced to consider the influence of power and cutting speed of laser on the kerf width together. From the results of experiments, the allowable cutting region and the relationship between the effective heat input and kerfwidth for the case of cutting of CSP IN sheet using high power CW Nd:YAG laser have been obtained to improve the dimensional accuracy of the cut area.

Direct writing technology on the silicon wafer surface is used to reduce the size of the chip as the miniature trend in electronic circuit. In order to improve the productivity and efficiency, the real time quality estimation is very important in each semiconductor process. In laser marking, marking quality is determined by readability which is dependant on the contrast of surface, the line width, and the melting depth. Many researchers have tried to find theoretical and numerical estimation models for groove geometry. However, these models are limited to be applied to the real system. In this study, the estimation system for the line width during the laser marking was proposed by process monitoring method. The light intensity emitted by plasma which is produced when irradiating the laser to the silicon wafer was measured using the optical sensor. Because the laser marking is too fast to measure with external sensor, we build up the coaxial monitoring system. Analysis for the correlation between the acquired signals and the line width according to the change of laser power was carried out. Also, we developed the models enabling the estimation of line width of the laser marking through the statistical regression models and may see that their estimating performances were excellent.

In laser machining such as drilling with C0₂ or Nd:YAG laser, and etching or ablation with Excimer laser, one of the most important parameters affecting the machining is known to be beam characteristics. In this paper a numerical study is performed to investigate the effects of beam parameters, especially in the process of excimer laser ablation of polymers. Results of different beam conditions reveal that if the ablated depth is small compared to beam size the simple photochemical etching model is suitable to predict the etched shape, and that the importance of precise alignment becomes large as beam quality factor becomes larger.

Microholes with high aspect ratio are required in microstructures. Among various methods for producing the microhole, micro electrical discharge machining (MEDM) is very effective and useful process. But, it is difficult to machine the high aspect ratio holes below 100 ㎛ in diameter because machining condition becomes unstable due to bad removal of debris at deep hole. In this paper, ultrasonic vibration is applied to MEDM work fluid to make a high aspect ratio micro hole. It is shown that the vibration is effective in circulating the debris and increasing the machining rate. As a result, produced was a micro hole with 92 ㎛ entrance diameter, 81 ㎛ exit diameter and aspect ratio 23.

A simulator for virtual laser machining is developed to help understanding and predicting the effects of machining parameters on the final machined results. Main program is based on the model for polymer ablation with short pulse excimer lasers. Version I of the simulator is built using Visual Fortran to make the user work under visual environment such as Windows on PC, where the important machining parameters can be input via dialog box and the calculated results for machined shape, beam fluence, and temperature distribution can be plotted through the 2-D graphics windows. Version Ⅱ of the simulator is built using HTML, CGI and JAVA languages, allowing the user to control the input parameters and to see the results plot through the internet.

The nanoindenter and AFM have been used for nanofabrication, such as nanolithography, nanowriting, and nanopatterning, as well as measurement of mechanical properties and surface topology. Nanoscale indents can be used as cells for molecular electronics and drug delivery, slots for integration into nanodevices, and defects for tailoring the structure and properties. Therefore, it is very important to make indents of desired morphology (shape, size and depth). Indents of different shapes can be obtained by using indenters of different geometries such as a cube corner and conical and spherical tips. The depth and size of indents can be controlled by making indentations at different indentation loads. However, in case of viscoplastic viscoelastic materials such as polymethylmethacrylate (PMMA) the time dependent deformation (TDD) should also be considered. In this study, the effect of process parameters such as loading rate and hold-time at peak load on the indent morphology (maximum penetration depth, elastic recovery, transient creep recovery, residual depth pile-up height) of PMMA were studied for hyperfine pattern fabrication.

The purpose of this study is to suggest a hyperfine maskless writing technique by using the nanoindentation and HF wet etching technique. Indents were made on the surface of Pyrex 7740 glass by the hyperfine indentation process with a Berkovich diamond indenter, and they were etched in 50 wt％ HF solution. After etching process, convex structure was obtained due to the deformation-induced hillock phenomena. In this study, effects of indentation process parameters (etching time, normal load, loading rate, hold-time at the maximum load) on the morphologies of the indented surfaces after isotopic etching were investigated from an angle of deformation energies. Finally, sample characters were written to show the possibility of the application.

This paper summarizes the work on the development of a simulation program for modelling the process of machining quasi-three dimensional shape with the excimer laser beam on a constantly moving polymers. Relatively simple masks of rectangle, triangle and half circle shape are considered. The etching depth is calculated by considering the number of laser pulses irradiated on the specimen surface. It was found that similar shapes as experimental results can be obtained by choosing suitable parameters of moving velocity, moving distance and mask sizes.

moire topography method is a well-known non-contacting 3-D measurement method. Recently, the automatic 3-D measurement by moire topography has been required, since the method was frequently applied to the engineering and medical fields. The 3-D measurement using projection moire topography is very attractive because of its high measuring speed and high sensitivity. In this paper, using two-wavelength method of projection moire topography was tested to measuring object with 2n-ambiguity problems. The experimental results prove that the proposed scheme is capable of finding absolute fringe orders, so that the 2n-ambiguity problems can be effectively overcome so as to treat large step discontinuities in measured objects.

This work proposes a new method for describing the hysteresis non-linearity of a piezoelectric actuator. The hysteresis behaviour of piezoelectric actuators, including the minor loop trajectory, are modeled by geometrical relationship between a reference major loop and its minor loops. This hysteresis model is transformed into inverse hysteresis model in order to output compensated voltage with regard to the given input displacement. A feedforward neural network, which is trained by a feedback PID control module, is incorporated to the inverse hysteresis model to compensate unknown dynamics of the piezoelectric system. To show the feasibility of the proposed feedforward-feedback controller, some experiments have been carried out and the tracking performance was compared to that of simple PID controller.

In this paper, we address a position control for a parallel stage, which is levitated and driven by electric magnetic force. This consists of a levitating object (called platen) with 4 permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion by the vertical and horizontal force. A dynamic equation of the stage system is derived based on Newton-Euler method and it's special Jacobian matrix describing a relation between the limited velocity and Cartesian velocity is done. There are proposed two control methods for positioning which are Cartesian space controller and Actuator space controller. The control performance of the Cartesian space controller is better than the Actuator space controller in task space trajectory while the Actuator space controller is simpler than the Cartesian space controller in controller realization.

This paper is concerned with smooth trajectory generation of biped robot which has inverted pendulum type balancing weight. Genetic algorithm is used to generate the trajectory of the leg and balancing weight. Balancing trajectory can be determined by solving the second order differential equation under the condition that the reference ZMP (Zero moment point) is settled. Reference ZMP effect on gait pattern absolutely but the problem is how to determine the reference ZMP. Genetic algorithm can find optimal solution under the high order nonlinear situation. Optimal trajectory is generated when use genetic algorithm which has some genes and a fitness function. In this paper, minimization of balancing joints motion is used for the fitness function and set the weight factor of the two balancing joints at the fitness function. Inverted pendulum type balancing weight is very similar with human and this model can be used for humanoid robot. Simulation results show ZMP trajectory and the walking experiment made on the real biped robot IWR-IV.

Shoe with leather upper such as safety and golf shoe requires a roughing process where the upper is roughed for helping outsole to be cemented well. It is an important and basic process for production of leather shoe but is not automated yet. Thus, there are problems that the defect rate is high and the quality of roughed surface is not uniform. In order to solve such problems, the interest in automation of roughing process is being increased and this paper introduces CAM system for 5-axis automatic roughing machine as one part of automation of roughing process.
The CAM system developed interpolates a B-spline curve using points measured from the Roughing Path Measurement System. The B-spline curve is used to generate the tool path and orientation data for a roughing tool which has not only stiffness but also flexibility to rough the inclined surface efficiently. For productivity, the upper of shoe is machined by side of the roughing tool and tool offset is applied to the roughing tool for machining of inclined surface.
The generated NC code was applied to 5-axis polishing machine for the test. The upper of shoe was roughed well along the roughing path data from CAM and the roughed surface was proper for cementing of the outsole.

A new MR cylinder with built-in valves using MR fluid (MR valve) is suggested and fabricated for fluid control systems. The MR fluid is a newly developed functional fluid whose obvious viscosity is controlled by the applied magnetic field intensity. The MR cylinder is composed of cylinder with small clearance and piston with electromagnet. The differential pressure is controlled by the applied magnetic field intensity. It has the characteristics of simple, compact and reliable structure. The size of MR cylinder and piston has φ>30㎜×300㎜ and φ>28.5㎜×I20㎜ in face size, respectively and O.8㎜ in gap length. Through experiments, it was found that the differential pressure is controlled by the applied magnetic field intensity under little influence of the flow rate, which corresponds to a pressure control valve. The differential pressure of 0.47MPa was obtained with the input current of 1.5A. The rising time was 2.3s in step response of a manipulator using the MR cylinder. The effectiveness of the MR cylinder was also demonstrated through the position control.