Chemical mechanical planarization (CMP) is a semiconductor process which is necessary for multi-layer interconnection structure. CMP pad is a consumable used in the process and with numerous asperities on the surface that wear out by the load applied from the contact with the wafer. Also, it has a patterned wafer, the step height is gradually removed by contact of the asperities with upper and lower layers. The contact state would be different according to the step height reduction. Likewise, depending on the pattern size at the specific step height, the maximum radius of the asperity curvature differs whether it reaches the down area. In this study, the height distribution of asperities was expressed as a function of time and asperity height taking into account the wear of asperities, and based on the Greenwood-Williamson theory, a mathematical model for material removal rate considering pattern size was derived. The consistency of the novel model is verified with the CMP experiment conducted using oxide patterned wafers, and the experimental data were compared with the residual step height using theoretical removal rate. The root mean square error of the step height reduction was 19.84 nm.

For years, crane, a chain block, an elevator and a forklift truck have been developed and used to carry heavy loads, but manpower needed where heavy equipment use is not practical. Aging workers suffer from musculoskeletal disorders, and are helped by developing various muscle assisting wearable robots. Industrial wearable robots must meet the payload capacity required for the pilot"s overall operation to ensure safety and operational performance. However, the payload capacity of wearable robot using rotary actuator or linear actuator at the knee joint decreases dramatically in the knee-flexion posture, with reduced moment arms. To solve this problem, the author recommends using Single Acting Hydraulic Telescopic Cylinder Electro Hydrostatic Actuator (SAT-EHA) to increase the torque of the knee in the knee flexion position. The characteristic of telescopic cylinder is high speed in 1st stage and high force in 2nd stage. The Human Universal Mobility Assist-Hybrid (HUMA-H) was developed by designing and fabricating the waist joint to balance the front and rear directions using an electric motor driver. As the payload capacity increases, the robot pilots can squat and stand up with heavy loads. The performance was verified through the operation test and respiratory gas analysis test of the manufactured HUMA-H.

Recently, instrument stages using flexure guide mechanisms and piezo actuators have been widely used for an ultra-precision positioning system in various industries. Research into ultra-precision position control aiming at nanoscale position errors during stage driving is being actively conducted, as well as various studies on the motion profile adjusting the reference input. In this study, we suggested a motion profile with snap and feedforward for use with a high speed nano scanning system, as compared and analyzed with the position tracking error through feedback control, and also compared to the related feed with the forward control noted as minimized at the position error to 14.19 nm. As a result, a tracking error when applying the fourth profile with snaps to the piezoelectric stage, is obtained with an error reduction effect of about 15%, as compared to when the second profile is applied.

The article presents the influence of the deformation process on the microstructure and mechanical properties of low carbon alloy steel which heat treatment by TBF processing. When the samples are deformed at different levels: 20, 40, and 80%. The research results show that when the sample was deformed with the 80%, the highest strength was 800 MPa, the highest elongation was 36%, the product between the strength and the elongation (Rm*A) was the highest, 28774 MPa*%. This alloy deformed at a level of 80%, the content of austenite in this microstructure of this alloy was the highest about 16%. The content of ferrite was 52% with the average particle size of ferrite was 6.4 μm, the particle of residual austenite was 2 μm. The results of the microstructure have contributed to improving the mechanical properties of steel. The phase which was improved the mechanical properties of this alloy had grain size and dispersed.

This study aims to investigate the fatigue life of T-Type fillet welded joints for excavators subjected to bending loads, and also to verify the predicted fatigue life of the welded part using the effective notch stress method. Moreover, this study aims to determine an optimal toe angle of the T-Type fillet welded structure. In this context, the fatigue lives of T-Type fillet welded specimens (SM490A) were measured and the effective notch stress method for predicting the fatigue life of the T-Type fillet welded structure was verified by comparing with the FAT-225 curve of IIW (International Institute of Welding) as was suggested for the current types of welded structures. Considering simultaneously the scattering factor of the welded structure, the stress condition at the toe part higher than the root part, and the stress minimization condition of the toe part, the optimum toe angle at the T-Type fillet welding was identified at 30°. Likewise, the maximum stress (310.5 MPa) when the toe angle was 30° was about 14% less than the maximum stress (354.0 MPa) at 45°, and the fatigue life was improved by about 30%.

The input shaft of gearbox usually bears a cyclic variation of torque, which may lead to the risk of experiencing a fatigue fracture. To evaluate the fatigue life accurately and identify the weak parts, the ANSYS is used to simulate the torsional fatigue of the input shaft for the gearbox, and the fatigue life of the weak part is obtained, which is then tested and verified by the torsional fatigue testing in the MTS torsional fatigue test rig. The test results show that the maximum difference is 14% between the calculated life and the testing results, indicating that the simulation value can reflect the actual fatigue life accurately. Notably, the cracks appear in the large oil holes, and its life is mainly concentrated in the crack initiation stage, accounting for 99.2% of the total life. The analysis results show that the fatigue life of the software simulation has the guiding significance for the life evaluation. The fatigue life of the shaft can be quickly calculated by the simulation to reduce the number of fatigue tests and achieve cost-effectiveness.

This paper presents the effects of bearing locations on the mechanical characteristics of a multi-stepped spindle system related to bearing fatigue life, natural frequency, and static stiffness. The multi-stepped spindle is supported by a pair of tapered roller bearings (TRBs) and subjected to radial loading. To solve the equilibrium equation of the spindle system which is inherently statically-indeterminate, this study adopts an integrated shaft-bearing model, where the spindle is modelled by the finite shaft elements and the supporting TRBs are modelled by the five degrees-of-freedom TRB model developed by the authors. An iterative computational method is used to estimate the spindle deflection coupled with bearing deflections, and afterwards the bearing stiffness and internal contact loads of rolling elements are computed. The bearing fatigue life based on the ISO standard and the first natural frequency of the spindle system are evaluated with the spindle-bearing model. The influences of bearing locations on the static stiffness and natural frequency of the spindle, and the fatigue life of TRBs are rigorously investigated. The numerical results show the noticeable effects of bearing locations on the spindle system characteristics. The presented results provide a comprehensive assessment to aid for design optimization of spindle-TRB system.

We studied compressive behavior of two types of lattice structures having small-scale struts fabricated by utilizing a metal additive manufacturing process. Generally known, the lattice structure has some advantages such as lightweight and high specific mechanical strength, allowing diverse potential applications in the aerospace and mobility industries. In this work, we proposed two types of lattice such as body-centered truss (BCT) and octahedral truss (OCT) that were designed and fabricated for a compression test. From the experimental results, the OCT has much higher strength than the BCT, and all cases showed several buckling modes during the compressive behavior. Furthermore, ‘restructuring’ occurred with BCT, and the compressive force increased overall but fluctuated due to the restructuring by an increase of compression. Through this work, we found out that the BCT has the interesting compressive behaviors, and a repetitive bucking-restructuring was found. In fact, its strength could be increased continuously by the restructuring during compression. In conclusion, the BCT has key-characteristics of lightweight and re-strengthening, which are applicable to various applications in the industry.

In order to maintain parts critical to using 3D printing technology, it is necessary to provide the user with information about powders, equipment, processing conditions, and inspection methods, as well as 3D CAD models used as input files for 3D printing operations. In order to address this issue, this paper proposes a manufacturing condition retrieval system that provides the information necessary for the maintenance of parts important to using 3D printing technology. To accomplish this, we define a data structure that stores manufacturing condition information for 3D printers. Then, after analyzing the user"s requirements, we design the manufacturing condition retrieval system. Finally, we implement a prototype system, construct a database using sample manufacturing condition sheets, and perform data retrieval experiments.