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슬러리 유동
WHERE t1.sid in(parameter_dbtbl_keyword '%슬러리 유동%') and t1.xml_status <> 99
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"슬러리 유동"
REGULAR
Effect of Slurry Flow in Spray Slurry Nozzle System on Cu CMP
Da Sol Lee, Seon Ho Jeong, Jong Woo Lee, Jin Yeop Jeong, Hae Do Jeong
J. Korean Soc. Precis. Eng.
2017;34(2):101-106.
Published online February 1, 2017
DOI:
https://doi.org/10.7736/KSPE.2017.34.2.101
Citations
Citations to this article as recorded by
Improvement of Interface Diffusion in Cu thin films using SiN/CoWB Passivation Layer
Jung Woong Kim, Sean Jhin Yoon, Hyun Chan Kim, Youngmin Yun, Jaehwan Kim
Journal of the Korean Society for Precision Engineering
.2018; 35(12): 1163.
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