The residual vibration during the high acceleration and deceleration of a motion stage degrades the manufacturingsystem productivity and lifespan. Although a passive RFC mechanism with a movable magnet track reduces the residual vibration of the system base, a magnet track resonance may occur according to the motion profile, and the mover inposition error increases due to the residual vibration of the magnet track. We investigated input-shaping methods for a linear motor motion stage with a passive RFC mechanism. An air-bearing linear motor motion stage with the passive RFC mechanism is built, and the dynamic characteristic of the passive RFC mechanism is identified using a freevibration test. Then, mover velocity profiles are generated using various input-shaping methods. Further, the effects of the input-shaping methods on the air-bearing linear motor motion stage are investigated by comparing the magnet track oscillation, settling time, and mover in-position error. Finally, several input-shaping methods are applied to reduce the mover rise-time delay for the proposed linear motor motion stage. A properly shaped input motion profile removes the residual vibration of the passive RFC mechanism without any additional devices, as well as reducing the transmitted reaction force and the in-position error.
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Fuzzy Neural Network Control for a Reaction Force Compensation Linear Motor Motion Stage Kyung Ho Yang, Hyeong-Joon Ahn International Journal of Precision Engineering and Manufacturing-Smart Technology.2024; 2(2): 109. CrossRef
Software-Based Integral Product Architecture for Modular Motion Control System of a RFC Linear Motor Motion Stage: Model-Based DOB for Residual Vibration Suppression Seong Jong Yoo, Hyeong-Joon Ahn International Journal of Precision Engineering and Manufacturing.2020; 21(2): 203. CrossRef
Evaluation of Input Shaping Methods for the Nonlinear Vibration System Using a Furuta Pendulum Anh-Duc Pham, Hyeong-Joon Ahn Journal of the Korean Society for Precision Engineering.2020; 37(11): 827. CrossRef