Optical dimensional metrology has playing a long-term key role from high-precision engineering to large-scale industrial manufacturing. Various methods of optical dimensional metrology have been proposed and demonstrated to respond to the ever-growing industrial demands as well as fundamental science demands for the measurement precision and range. However, most of them demonstrated under laboratory conditions have a long way to go outside the laboratory. Here, we present a progress review on optical modulation technique-based dimensional metrology, which has already been used in real applications and has been commercialized. Amplitude modulation (AM) and frequency modulation (FM) based dimensional measurement techniques are described with their operating principles, and recent progresses and applications in 3D imaging are presented in this review.

Various chemicals are used for semiconductor process. In particular, the most important element in the etching and cleaning process is chemical liquid. An ultrasonic flow meter is used to monitor the supplying amount of chemical solution. If the ultrasonic flow meter contains bubble inside the liquid, measurement cannot be performed or measurement error will be occurred. In this research, the waveform was improved by zero-crossing processing so that the influence on measurement performance is negligible even if the bubble in the chemical solution is included. Consequently, the amplitude of the sound wave is attenuated. Existing flow meters monitor the amplitude value to determine the authenticity of the signal and to filter the noise. The improved method in this study distinguishes noise waves and monitors signal frequency. Flow measurement was carrying out even when the amplitude was resulting only less than 3% of input level volt. The system developed of this study has shown an exact measuring performance compared with the other make’s flow meters.

In this paper, we describe high-stable RF-frequency generation using a low-cost 8-bit microcontroller for amplitudemodulation based distance measurement, which is one of the indispensable technologies for cost-effective Lidar application. The RF frequency generator using the microcontroller was implemented by externally referencing to an atomic clock and 8- bit timer/pulse width modulation (PWM) functions, which are embedded in a microcontroller. The microcontroller we used was ATmega128 of Microchip with 16 MHz clock and 8-bit timer, which generates the maximum frequency of up to 62.5 kHz, enabling 2.4-kilometer ranging without phase ambiguity. The stability of RF-frequency generated from the implemented system was evaluated in terms of Allan deviation using a commercial frequency counter. The stability indicated 10^-11 at 1-s averaging time and 10^-12 at 100 s averaging time, which represents a 1/10 degradation compared to the stability of the commercial function generator. Along with the stability evaluation, we interrogated frequency tunability, which extends a measurable range without phase ambiguity.