Various chemicals are used for semiconductor process. In particular, the most important element in the etching and cleaning process is chemical liquid. An ultrasonic flow meter is used to monitor the supplying amount of chemical solution. If the ultrasonic flow meter contains bubble inside the liquid, measurement cannot be performed or measurement error will be occurred. In this research, the waveform was improved by zero-crossing processing so that the influence on measurement performance is negligible even if the bubble in the chemical solution is included. Consequently, the amplitude of the sound wave is attenuated. Existing flow meters monitor the amplitude value to determine the authenticity of the signal and to filter the noise. The improved method in this study distinguishes noise waves and monitors signal frequency. Flow measurement was carrying out even when the amplitude was resulting only less than 3% of input level volt. The system developed of this study has shown an exact measuring performance compared with the other make’s flow meters.

A pulsed-power source has the advantage of releasing a peak power over a short time interval. In this study, we implemented two types of such energy source, namely laser and dielectric break down power sources. We built the highpressure flow-output actuator utilizing such power sources in a micro-jet drug delivery system. We compared the jet speed from each power source and analyzed the drug penetration performance of the micro-jet injector. We found that hat the bubble growth rate caused by a dielectric breakdown power source per power input was three times faster than the laser power source. By using the micro-jet injector, we performed the insulin injection test using mouse models having diabetes mellitus to evaluate whether micro-jet injector has equivalent drug delivery performance when compared against conventional syringe-type injection.