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JKSPE : Journal of the Korean Society for Precision Engineering

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마스크에 대한 기계적 가공을 이용한 단결정 실리콘의 미세 패턴 가공

진원혁, 김대은

Selective Removal of Mask by Mechanical Cutting for Micro-patterning of Silicon

Won-Hyeog Jin, Dae-Eun Kim
JKSPE 1999;16(2):60-67.
Published online: February 1, 1999
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Selective Removal of Mask by Mechanical Cutting for Micro-patterning of Silicon
J. Korean Soc. Precis. Eng.. 1999;16(2):60-67.   Published online February 1, 1999
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Selective Removal of Mask by Mechanical Cutting for Micro-patterning of Silicon
J. Korean Soc. Precis. Eng.. 1999;16(2):60-67.   Published online February 1, 1999
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