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JKSPE : Journal of the Korean Society for Precision Engineering

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의료용 도뇨관 표면의 도선용 구리 박막 증착을 위한 스퍼터링-열증착 연속공정장비의 설계 및 개발

장준근, 정석

Design and Development of Sputter-evaporation System for Micro-wiring on Medical Catheter

Jun Keun Chang, Seok Chung
JKSPE 1999;16(3):62-71.
Published online: March 1, 1999
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Design and Development of Sputter-evaporation System for Micro-wiring on Medical Catheter
J. Korean Soc. Precis. Eng.. 1999;16(3):62-71.   Published online March 1, 1999
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
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Design and Development of Sputter-evaporation System for Micro-wiring on Medical Catheter
J. Korean Soc. Precis. Eng.. 1999;16(3):62-71.   Published online March 1, 1999
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