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JKSPE : Journal of the Korean Society for Precision Engineering

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실리콘 웨이퍼 직접접합에서 내인성 Bubble의 거동에 관한 연구

문도민, 정해도

The Behavior of Intrinsic Bubbles in Silicon Wafer Direct Bonding

Do-Min Moon, Hae-Do Jeong
JKSPE 1999;16(3):78-83.
Published online: March 1, 1999
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The Behavior of Intrinsic Bubbles in Silicon Wafer Direct Bonding
J. Korean Soc. Precis. Eng.. 1999;16(3):78-83.   Published online March 1, 1999
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
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The Behavior of Intrinsic Bubbles in Silicon Wafer Direct Bonding
J. Korean Soc. Precis. Eng.. 1999;16(3):78-83.   Published online March 1, 1999
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