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능동제어모세관을 이용한 유정압테이블의 운동정도 향상

박천홍, 송영찬, 김수태, 이후상

Improvement of Motion Accuracy Using Active Controlled Capillary in Hydrostatic Table

Chun-Hong Park, Yong-Chan Song, Soo-Tae Kim, Hu-Sang Lee
JKSPE 1997;14(12):114-120.
Published online: December 1, 1997
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Improvement of Motion Accuracy Using Active Controlled Capillary in Hydrostatic Table
J. Korean Soc. Precis. Eng.. 1997;14(12):114-120.   Published online December 1, 1997
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Improvement of Motion Accuracy Using Active Controlled Capillary in Hydrostatic Table
J. Korean Soc. Precis. Eng.. 1997;14(12):114-120.   Published online December 1, 1997
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