Micromachined Mercury Drop Tilt Sensor

Jong Hyun Oh; Dong Young Oh; Seung S. Lee

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MEMS기술을 이용한 수은방울경사각센서 개발

오종현, 오동영, 이승섭

Micromachined Mercury Drop Tilt Sensor

Jong Hyun Oh, Dong Young Oh, Seung S. Lee

JKSPE 2000;17(8):120-125.

Published online: August 1, 2000

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Micromachined Mercury Drop Tilt Sensor

J. Korean Soc. Precis. Eng.. 2000;17(8):120-125. Published online August 1, 2000

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Micromachined Mercury Drop Tilt Sensor

J. Korean Soc. Precis. Eng.. 2000;17(8):120-125. Published online August 1, 2000

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MEMS기술을 이용한 수은방울경사각센서 개발

Micromachined Mercury Drop Tilt Sensor

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