Fabrication of A 3-facet Mirror Using the LIGA Process

Dong-Young Oh; Dong Kwan Jung; Noh Y. Park; Suk Sang Chang; Seung S. Lee

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LIGA 공정을 이용한 삼면반사체 제작

오동영, 정동관, 박노열, 장석상, 이승섭

Fabrication of A 3-facet Mirror Using the LIGA Process

Dong-Young Oh, Dong Kwan Jung, Noh Y. Park, Suk Sang Chang, Seung S. Lee

JKSPE 2000;17(8):172-179.

Published online: August 1, 2000

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Fabrication of A 3-facet Mirror Using the LIGA Process

J. Korean Soc. Precis. Eng.. 2000;17(8):172-179. Published online August 1, 2000

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Fabrication of A 3-facet Mirror Using the LIGA Process

J. Korean Soc. Precis. Eng.. 2000;17(8):172-179. Published online August 1, 2000

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LIGA 공정을 이용한 삼면반사체 제작

Fabrication of A 3-facet Mirror Using the LIGA Process

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