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FEM 을 이용한 유정압테이블의 운동정밀도 해석

박천홍, 이후상, 김태형, 김민기

Finite Element Analysis on the Motion Accuracy of Hydrostatic Table - (2nd .Analysis and Experimental Verification on Double Sides Table -

Chun Hong Park, Husang Lee, Tae Hyoung Kim, Min Gi Kim
JKSPE 2002;19(1):65-70.
Published online: January 1, 2002
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Finite Element Analysis on the Motion Accuracy of Hydrostatic Table - (2nd .Analysis and Experimental Verification on Double Sides Table -
J. Korean Soc. Precis. Eng.. 2002;19(1):65-70.   Published online January 1, 2002
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Finite Element Analysis on the Motion Accuracy of Hydrostatic Table - (2nd .Analysis and Experimental Verification on Double Sides Table -
J. Korean Soc. Precis. Eng.. 2002;19(1):65-70.   Published online January 1, 2002
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