Chemical Mechanical Polishing of Aluminum Thin Films

Woong Cho; Yoomin Ahn; Chang-Wook Baek; Yong-Kweon Kim

Articles

Page Path

Article

알루미늄 박막의 화학기계적연마 가공에 관한 연구

조웅, 안유민, 백창욱, 김용권

Chemical Mechanical Polishing of Aluminum Thin Films

Woong Cho, Yoomin Ahn, Chang-Wook Baek, Yong-Kweon Kim

JKSPE 2002;19(2):49-57.

Published online: February 1, 2002

Author Affiliations

6 Views
0 Download
0 Crossref
0 Scopus

prev next

Full Article

Download PDF

Citations

Citations to this article as recorded by

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Chemical Mechanical Polishing of Aluminum Thin Films

J. Korean Soc. Precis. Eng.. 2002;19(2):49-57. Published online February 1, 2002

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Chemical Mechanical Polishing of Aluminum Thin Films

J. Korean Soc. Precis. Eng.. 2002;19(2):49-57. Published online February 1, 2002

Articles

Page Path

알루미늄 박막의 화학기계적연마 가공에 관한 연구

Chemical Mechanical Polishing of Aluminum Thin Films

Full Article

Citations

CITE

Download Citation

Format:

Include:

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS