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JKSPE : Journal of the Korean Society for Precision Engineering

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반도체 클린룸의 오염원 정보

김광영, 이응선

Information of Contamination in Semiconductor Cleanroom

Kwangyoung Kim, Eungsun Lee
JKSPE 2002;19(8):7-15.
Published online: August 1, 2002
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Information of Contamination in Semiconductor Cleanroom
J. Korean Soc. Precis. Eng.. 2002;19(8):7-15.   Published online August 1, 2002
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Information of Contamination in Semiconductor Cleanroom
J. Korean Soc. Precis. Eng.. 2002;19(8):7-15.   Published online August 1, 2002
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