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다구찌 방법을 이용한 레이저 리소그라피 미세패턴 가공조건의 최적화

백남국, 김대은

Optimization of Laser Lithography Micropatterning Technique based on Taguchi Method

Nam-Kook Baek, Dae-Eun Kim
JKSPE 2002;19(7):59-63.
Published online: July 1, 2002
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Optimization of Laser Lithography Micropatterning Technique based on Taguchi Method
J. Korean Soc. Precis. Eng.. 2002;19(7):59-63.   Published online July 1, 2002
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Optimization of Laser Lithography Micropatterning Technique based on Taguchi Method
J. Korean Soc. Precis. Eng.. 2002;19(7):59-63.   Published online July 1, 2002
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