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미세탐침기반 기계-화학적 리소그래피공정에 의한 미이크로/나노패턴 제작

성인하, 김대은

Fabrication of Micro/Nano-patterns using MC-SPL (Mechano-Chemical Scanning Probe Lithography) Process

In-Ha Sung, Dae-Eun Kim
JKSPE 2002;19(11):228-233.
Published online: November 1, 2002
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Fabrication of Micro/Nano-patterns using MC-SPL (Mechano-Chemical Scanning Probe Lithography) Process
J. Korean Soc. Precis. Eng.. 2002;19(11):228-233.   Published online November 1, 2002
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Fabrication of Micro/Nano-patterns using MC-SPL (Mechano-Chemical Scanning Probe Lithography) Process
J. Korean Soc. Precis. Eng.. 2002;19(11):228-233.   Published online November 1, 2002
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