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ER 유체를 이용한 미세 3 차원 형상의 초정밀연마

김욱배, 이상조, 김용준, 이응숙

Ultraprecision Polishing Technique for Micro 3-Dimensional Structures using ER Fluids

Wook-Bae Kim, Sang-Jo Lee, Yong-Jun Kim, Eung-Sug Lee
JKSPE 2002;19(12):134-141.
Published online: December 1, 2002



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Ultraprecision Polishing Technique for Micro 3-Dimensional Structures using ER Fluids
J. Korean Soc. Precis. Eng.. 2002;19(12):134-141.   Published online December 1, 2002
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Ultraprecision Polishing Technique for Micro 3-Dimensional Structures using ER Fluids
J. Korean Soc. Precis. Eng.. 2002;19(12):134-141.   Published online December 1, 2002
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