This paper describes the development of a small 6-axis force/moment sensor for robot's finger, which measures forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously. In order to safely grasp an unknown object using the robot's gripper, and accurately perceive the position of it in the gripper, it should measure the force in the gripping direction, the force in the gravity direction and the moments each direction, and perform the force control using the measured forces and moments. Also, it should detect the moments Mx (x-direction moment), My and Mz to accurately perceive the position of the object in the grippers. Thus, the robot's gripper should be composed of 6-axis force/moment sensor that can measure forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously. In this paper, the small 6-axis force/moment sensor for measuring forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously was newly modeled using several parallel-plate beams, designed, and fabricated. The characteristic test for the developed sensor was performed, and the result shows that interference errors of the developed sensor are less than 4.23%. Thus, the developed small 6-axis force/moment sensor may be used a robot's gripper.
