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나노 임프린트 공정에서의 기계적 물성 측정

김재현, 이학주, 최병익, 강재윤, 오충석

Mechanical Property Measurement in Nano Imprint Process

Jae-Hyun Kim, Hak-Joo Lee, Byung-Ik Choi, Jae-Yoon Kang, Chung-Seog oh
JKSPE 2004;21(6):7-14.
Published online: June 1, 2004



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Mechanical Property Measurement in Nano Imprint Process
J. Korean Soc. Precis. Eng.. 2004;21(6):7-14.   Published online June 1, 2004
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Mechanical Property Measurement in Nano Imprint Process
J. Korean Soc. Precis. Eng.. 2004;21(6):7-14.   Published online June 1, 2004
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