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대칭형 2자유도의 폴리실리콘 공진 구조체에 대한 진동특성 분석

홍윤식, 이종현, 김수현

Investigation on the Vibration Characteristics of a Symmetric 2DOF Polysilicon Resonator

Yoon Shik Hong, Jong Hyun Lee, Soo Hyun Kim
JKSPE 2000;17(11):81-87.
Published online: November 1, 2000



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Investigation on the Vibration Characteristics of a Symmetric 2DOF Polysilicon Resonator
J. Korean Soc. Precis. Eng.. 2000;17(11):81-87.   Published online November 1, 2000
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Investigation on the Vibration Characteristics of a Symmetric 2DOF Polysilicon Resonator
J. Korean Soc. Precis. Eng.. 2000;17(11):81-87.   Published online November 1, 2000
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