Velocity and Friction Force Distribution in Rotary CMP Equipment

Hyoungjae Kim; Haedo Jeong; Eungsug Lee; Youngjae Shin

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회전형 CMP장비의 속도 및 마찰력 분포 해석

김형재, 정해도, 이응숙, 신영재

Velocity and Friction Force Distribution in Rotary CMP Equipment

Hyoungjae Kim, Haedo Jeong, Eungsug Lee, Youngjae Shin

JKSPE 2003;20(5):39-46.

Published online: May 1, 2003

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Velocity and Friction Force Distribution in Rotary CMP Equipment

J. Korean Soc. Precis. Eng.. 2003;20(5):39-46. Published online May 1, 2003

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Velocity and Friction Force Distribution in Rotary CMP Equipment

J. Korean Soc. Precis. Eng.. 2003;20(5):39-46. Published online May 1, 2003

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회전형 CMP장비의 속도 및 마찰력 분포 해석

Velocity and Friction Force Distribution in Rotary CMP Equipment

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