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나노인덴테이션을 이용하여 극미세 패턴을 제작하기 위한 나노 변형의 유한요소해석(Ⅰ)

이정우, 윤성원, 강충길

Finite Element Analysis of Nano Deformation for the Hyper-Fine Pattern Fabrication by using Nanoindentation

Jung Woo Lee, Sung Won Youn, Chung Gil Kang
JKSPE 2003;20(5):210-217.
Published online: May 1, 2003



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Finite Element Analysis of Nano Deformation for the Hyper-Fine Pattern Fabrication by using Nanoindentation
J. Korean Soc. Precis. Eng.. 2003;20(5):210-217.   Published online May 1, 2003
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Finite Element Analysis of Nano Deformation for the Hyper-Fine Pattern Fabrication by using Nanoindentation
J. Korean Soc. Precis. Eng.. 2003;20(5):210-217.   Published online May 1, 2003
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