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미소 진폭 진동 측정을 위한 기계적 변조 방식의 헤테로다인 간섭계

강성구, 라종필, 윤희선, 박기환

Synthetic Heterodyne Interferometry for Measuring Small Amplitude of Vibration

Seong Gu Kang, Jong Pil La, Heesun Yoon, Kyi Hwan Park
JKSPE 2007;24(11):15-21.
Published online: November 1, 2007



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Synthetic Heterodyne Interferometry for Measuring Small Amplitude of Vibration
J. Korean Soc. Precis. Eng.. 2007;24(11):15-21.   Published online November 1, 2007
Download Citation

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Synthetic Heterodyne Interferometry for Measuring Small Amplitude of Vibration
J. Korean Soc. Precis. Eng.. 2007;24(11):15-21.   Published online November 1, 2007
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