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고효율 광학 소자를 위한 전자빔 및 나노임프린트 기술

조상욱, 오승훈, 김창석, 정명영

Electron Beam Lithography and Nano Imprint Lithography for High-Efficiency Optical Devices

Sang UK Cho, Seung Hun Oh, Chang-Seok Kim, Myung Yung Jeong
JKSPE 2009;26(6):7-13.
Published online: June 1, 2009



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Electron Beam Lithography and Nano Imprint Lithography for High-Efficiency Optical Devices
J. Korean Soc. Precis. Eng.. 2009;26(6):7-13.   Published online June 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Electron Beam Lithography and Nano Imprint Lithography for High-Efficiency Optical Devices
J. Korean Soc. Precis. Eng.. 2009;26(6):7-13.   Published online June 1, 2009
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