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다층 나노임프린트 리소그래피 공정장비 기술

이재종, 최기봉, 김기홍, 박수연

Technology for the Multi-layer Nanoimprint Lithography Equipments

JaeJong Lee, KeeBong Choi, GeeHong Kim, SooYeon Park
JKSPE 2009;26(6):21-25.
Published online: June 1, 2009



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Technology for the Multi-layer Nanoimprint Lithography Equipments
J. Korean Soc. Precis. Eng.. 2009;26(6):21-25.   Published online June 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Technology for the Multi-layer Nanoimprint Lithography Equipments
J. Korean Soc. Precis. Eng.. 2009;26(6):21-25.   Published online June 1, 2009
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