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JKSPE : Journal of the Korean Society for Precision Engineering

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피코초 레이저 어블레이션을 이용한 미세 가공 연구

노지환, 손현기, 서정, 이제훈

The Study of Micro Fabrication using Picosecond Laser Ablation

Jiwhan Noh, Hyonkee Sohn, Jeong Suh, Jaehoon Lee
JKSPE 2010;27(2):25-28.
Published online: February 1, 2010
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The micro fabrication on the mold material using picosecond laser ablation processing has been studied. We used the two kind of system with picosecond laser. First one is two mirror type scanner and telecentric f-theta lens. Second one is X-Y stage and objective lens. By using these system, the 100㎛ size chess patterning and 2㎛ size patterning was fabricated. Especially 2㎛ size patterning on the mold material can be used as the decorative rainbow color logo for industrial field. In this paper, it is proved the picosecond laser is effective tool for the laser ablation processing.

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The Study of Micro Fabrication using Picosecond Laser Ablation
J. Korean Soc. Precis. Eng.. 2010;27(2):25-28.   Published online February 1, 2010
Download Citation

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The Study of Micro Fabrication using Picosecond Laser Ablation
J. Korean Soc. Precis. Eng.. 2010;27(2):25-28.   Published online February 1, 2010
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