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초정밀 측정용 정전용량 변위센서에 관한 연구

안형준, 장인배, 한동철

A Study on a Capacitive Displacement Sensor for the Ultraprecision Measurement

Hyeongjoon Ahn, Inbae Chang, Dongchul Han
JKSPE 1997;14(11):110-117.
Published online: November 1, 1997



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A Study on a Capacitive Displacement Sensor for the Ultraprecision Measurement
J. Korean Soc. Precis. Eng.. 1997;14(11):110-117.   Published online November 1, 1997
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A Study on a Capacitive Displacement Sensor for the Ultraprecision Measurement
J. Korean Soc. Precis. Eng.. 1997;14(11):110-117.   Published online November 1, 1997
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