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고경사 자유곡면 측정을 위한 파장변조 층밀리기 간섭계

이혁교, 김영식, 이주형, 양호순, 이윤우

Wavelength Scanning Lateral Shearing Interferometer for Freeform Surface Measurement

Hyug-Gyo Rhee, Young-Sik Ghim, Joohyong Lee, Ho-Soon Yang, Yun Woo Lee
JKSPE 2014;31(3):199-205.
Published online: March 1, 2014
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We propose a new variant of lateral shearing interferometer with a tunable laser source that enables 3D surface profile measurements of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view. We have verified the proposed technique by comparing our measurement result with that of an existing technique and measuring a representative sample of freeform optics. Moreover, we propose a new algorithm that is able to compensate the rotational inaccuracy.

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Wavelength Scanning Lateral Shearing Interferometer for Freeform Surface Measurement
J. Korean Soc. Precis. Eng.. 2014;31(3):199-205.   Published online March 1, 2014
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Wavelength Scanning Lateral Shearing Interferometer for Freeform Surface Measurement
J. Korean Soc. Precis. Eng.. 2014;31(3):199-205.   Published online March 1, 2014
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