Skip to main navigation Skip to main content
  • E-Submission

JKSPE : Journal of the Korean Society for Precision Engineering

OPEN ACCESS
Search
Advanced Search
ABOUT
BROWSE ARTICLES
EDITORIAL POLICIES
FOR CONTRIBUTORS

Articles

Page Path

Article

고진공 운송계에서의 정밀 압력제어장치의 설계 및 성능시험

장원익, 장기호, 정기로, 이종현

Design and Performance Evaluation of the Precision Pressure Control System for the High Vacuum Transport Module

Won Ick Jang, Kee Ho Jang, Ki Ro Jung , Jong Hyun Lee
JKSPE 1995;12(7):92-98.
Published online: July 1, 1995



  • 7 Views
  • 0 Download
  • 0 Crossref
  • 0 Scopus
prev

Full Article

Download PDF Download PDF

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

Include:

Design and Performance Evaluation of the Precision Pressure Control System for the High Vacuum Transport Module
J. Korean Soc. Precis. Eng.. 1995;12(7):92-98.   Published online July 1, 1995
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
Format:
Include:
Design and Performance Evaluation of the Precision Pressure Control System for the High Vacuum Transport Module
J. Korean Soc. Precis. Eng.. 1995;12(7):92-98.   Published online July 1, 1995
Close
JKSPE : Journal of the Korean Society for Precision Engineering

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS

© Korean Society for Precision Engineering.