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PCD 공구를 이용한 단결정 SiC의 미세 구멍 가공

이의석1, 양찬영2, 이주현2, 김보현2,#orcid

Micro Drilling of Single Crystal SiC Using Polycrystalline Diamond Tool

Ui Seok Lee1, Chan Young Yang2, Ju Hyeon Lee2, Bo Hyun Kim2,#orcid
Journal of the Korean Society for Precision Engineering 2021;38(7):471-478.
Published online: July 1, 2021

1 숭실대학교 대학원 기계공학과

2 숭실대학교 기계공학부

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#E-mail: bhkim@ssu.ac.kr, TEL: +82-2-820-0653
• Received: February 23, 2021   • Revised: May 27, 2021   • Accepted: May 29, 2021

Copyright © The Korean Society for Precision Engineering

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Micro Drilling of Single Crystal SiC Using Polycrystalline Diamond Tool
J. Korean Soc. Precis. Eng.. 2021;38(7):471-478.   Published online July 1, 2021
DOI: https://doi.org/10.7736/JKSPE.021.013
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Micro Drilling of Single Crystal SiC Using Polycrystalline Diamond Tool
J. Korean Soc. Precis. Eng.. 2021;38(7):471-478.   Published online July 1, 2021
DOI: https://doi.org/10.7736/JKSPE.021.013
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Micro Drilling of Single Crystal SiC Using Polycrystalline Diamond Tool
Image Image Image Image Image Image Image Image Image Image Image Image Image
Fig. 1 Micro drilling and WEDG system
Fig. 2 Schematic diagram of (a) Tool fabrication by WEDG, and (b) Micro drilling process
Fig. 3 Optical image of micro PCD tool fabricated by WEDG
Fig. 4 Thrust force during SiC drilling (3,000 rpm, Feedrate 0.5 μm/s)
Fig. 5 Average thrust force according to tool rotational speed (Feedrate 0.5 μm/s)
Fig. 6 Thrust force according to feedrate (Tool rotational speed 3,000 rpm)
Fig. 7 Surfaces of PCD tools fabricated with different capacitances (a) 200, and (b) 20,000 pF
Fig. 8 Surface profile of PCD tool EDMed with different capacitance: (a) 200, and (b) 20,000 pF
Fig. 9 Average thrust force in drilling using PCD micro tools fabricated with different capacitances
Fig. 10 Micro drilling under different lubrication condition: (a) Immersion flushing, and (b) MQL
Fig. 11 Comparison of thrust force for lubrication condition (3,000 rpm, Feedrate 0.5 μm/s)
Fig. 12 Comparison of hole according to feedrate: (a) 1, and (b) 0.5 μm/s (3,000 rpm, MQL)
Fig. 13 (a) Cross-sectional profile, and (b) 3D surface profile of micro hole on SiC wafer (3,000 rpm, Feedrate 0.5 μm/s)

Fig. 1

Fig. 2

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Fig. 5

Fig. 6

Fig. 7

Fig. 8

Fig. 9

Fig. 10

Fig. 11

Fig. 12

Fig. 13

Micro Drilling of Single Crystal SiC Using Polycrystalline Diamond Tool
Voltage [V] 100
Capacitance [pF] 200
20,000
Spindle speed [rpm] 2,000
Tool electrode Brass wire (Ø 200 μm)
Workpiece electrode PCD (Grain size 1 μm)
Tool diameter [μm] 110
Dielectric fluid Kerosene
Polytype 4H
Surface orientation (0 0 0 1)
Mohs hardness 9
Thermal conductivity [W/(cm∙K)] 3.7
Melting point [oC] 2,730
Sublimation point [oC] 2,830
Band gap [eV] 3.26
Electric resistivity rang [Ω∙cm] 0.025
Density [g/cm3] 3.21
Young modulus [GPa] 390-690
Poisson's ratio 0.21
Workpiece SiC wafer
Tool diameter [μm] 110
Total machining depth [μm] 200
Peaking depth [μm] 50
Spindle speed [rpm] 2,000, 3,000, 4,000
Feedrate [μm/s] 0.5, 0.75, 1.0
Cutting condition MQL, Immersion flushing
Table 1 Parameters for WEDG
Table 2 Material properties of SiC wafer
Table 3 Parameters for micro drilling

Table 1

Table 2

Table 3

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