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그루빙 가공공정을 활용한 저마늄 소재의 패턴가공기술 연구

함중규1, 강종균1, 맹환호1, 박성현2, 허진용3, 박영덕3, 김건희3,#orcid

A Study on Pattern Machining Technology for Germanium Materials Using Grooving Machining Process

Joong Kyu Ham1, Jong Gyun Kang1, Hwan Ho Maeng1, Seong Hyeon Park2, Jin Yong Heo3, Young Durk Park3, Geon Hee Kim3,#orcid
Journal of the Korean Society for Precision Engineering 2024;41(2):111-116.
Published online: February 1, 2024

1 충남대학교 대학원 기계공학부

2 한밭대학교 기계공학과

3 한밭대학교 기계소재융합시스템공학과

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#E-mail: ghkim@hanbat.ac.kr, TEL+82-42-828-8531
• Received: October 30, 2023   • Accepted: November 30, 2023

Copyright © The Korean Society for Precision Engineering

This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/3.0) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

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  • In the optical systems field, key components such as spectroscopic elements often require the use of optical materials with high-refractive indices to achieve miniaturization and lightweight characteristics. However, high-refractive index optical materials have low machinability due to their brittle characteristic. In this study, we investigated the changes in surface characteristics during precision pattern machining of high-refractive index materials; specifically, a low fracture toughness, for use in grating spectroscopic elements. The experiment involved diamond turning for the primary machining, and for the secondary pattern machining, the tool rake angle, tool feed rate, and depth of cut were set as variable conditions. Surface roughness measurements and surface quality analyses were carried out using a white-light interferometer and tool microscopy. The results provide insights into the influence of conditions on the surface properties during the machining of high-refractive index materials for grating spectroscopic components. Under the machining conditions with a tool rake angle of -65°, tool feed rate of 5,000 mm/min, and a depth of cut 10 nm, the surface roughness of Ra 8.0 nm was achieved. Based on these findings, we plan to conduct further research on the mechanical fabrication of the blaze angle for grating spectroscopic components.
  • KEYWORDS: Ultra-precision machining, Germanium, Grooving machining, Diamond turning machining, Blaze angle, Brittle material
  • KEYWORDS: 초정밀가공, 저마늄, 그루빙가공, 다이아몬드 터닝 가공, 쐐기 기울기, 취성재료
2021년 크리스마스에 발사되어 임무를 수행중인 제임스 웹 망원경(James Webb Space Telescope, JWST)과 2023년 국내에서 독자 개발한 한국형발사체를 통해 최초로 민간위성을 탑재하여 발사된 누리호(KSLV-II)를 통해 국내뿐 아니라 전 세계적으로 우주탐사 및 지구관측 등 우주공간에 대한 많은 연구를 진행하고 있다. 발사되어 임무를 수행하는 망원경과 위성의 핵심 부품은 탑재체인 광학계(Optical System)로 관측 스펙트럼에 따라 측정대상의 특성분석을 목적으로 빛을 집광시켜주는 반사경과 빛을 세분화하는 분광소자 등으로 구성되어 있다. 천문·우주 관련 기술의 발전으로 인하여 측정대상의 특성을 정확하고 세부적으로 분석하기 위해서는 위와 같은 핵심부품을 고품질로 제작하는 기술이 필수적이다. 광학계의 정량적인 성능지표인 분광분해능은 장비의 크기에 비례하기 때문에, 다양한 초정밀가공 기술을 활용한 대구경 반사경 및 분광소자를 제작하는 많은 연구가 진행되고 있다[1-3].
분광소자의 경우, 굴절률이 높은 광학소재를 사용하여 소형/경량화 시키는 것이 중요하지만 굴절률이 높은 광학소재의 경우 일반적으로 취성특성이 강하여 가공성이 낮다는 문제점이 있다[4,5,8].
Table 1

Material properties of germanium

Table 1
Material properties Value
Hardness [Hv, GPa] 7.6-8.1
Flexural strength [GPa] 0.067-0.11
Fracture toughness [MPa] 0.67
Tensile strength (Ultimate) [MPa] 135
Yield strength [MPa] 135
Modulus of elasticity [GPa] 103
Thermal conductivity [W/m·K] 59.9
본 연구에서는 낮은 파괴인성과 높은 경도로 인한 취성특성의 저마늄(Ge) 소재를 그레이팅 형태의 분광소자로 활용하기 위해 초정밀 패턴 가공 시 공구 경사각, 공구 이송속도, 절삭깊이의 가공조건에 따른 표면거칠기 및 표면품질 특성 변화에 대해 분석하였다.
2.1 실험시편 및 장비

2.1.1 실험시편 및 가공지그

실험시편은 저마늄 소재를 Fig. 1과 같이 Ø20, 10 t 의 실린더 형태로 가공하였고, 가공용 지그는 Al6061-T6 소재로 제작하여 시편 및 가공지그를 UV 경화 접착제를 활용하여 결합하였다.
Fig. 1

Germanium (Ge) sample with machining jig

KSPE_2024_v41n2_111_f001.jpg

2.1.2 가공장비

저마늄 시편을 광학소자로 활용하기 위해 1차 가공으로 활용한 장비는 Fig. 2의 Moore Nanotechnology Systems 사의 650FG v2 장비를 활용하였다. 해당 장비는 5축 초정밀 절삭가공장비로 다이아몬드 공구를 이용해 자유곡면 광학부품과 같은 피삭재를 초정밀로 가공하는 DT (Diamond Turing) 장비이다.
Fig. 2

Diamond turning machine

KSPE_2024_v41n2_111_f002.jpg
1차 가공된 시편의 가공면에 패턴가공을 목적으로 Fig. 3인 Nagase Integrex 사의 NIC-300PS5-N5 장비를 활용하여 2차가공인 그루빙가공을 진행하였다. 해당 장비는 X, Y, Z 직선축의 최소 분해능 1 nm급의 5축 초정밀가공기로 수 μm-수백 nm급 초미세 패턴가공과 동시 5축 제어가 가능하여 비축 비대칭 자유형상 가공에 주로 활용된다.
Fig. 3

Ultra-precision grooving machine

KSPE_2024_v41n2_111_f003.jpg
Table 2

Specification of 650FG v2

Table 2
Specifications Value
Linear axis travel range (X, Y, Z) [mm] 350, 150, 300
Workpiece (C-axis) [RPM] 10,000
Workpiece swing capacity [mm] Ø 750
Workpiece loading capacity [kg] 102
Linear axis programming resolution [nm] 0.01
Linear axis position feedback resolution [nm] 0.01
Table 3

Specification of NIC-300PS5-N5

Table 3
Specifications Value
Linear axis (X, Y, Z) [mm] 400, 650, 180
Linear axis feedrate (X, Y, Z) [mm/min] 20,000, 20,000, 1,000
Table diameter [mm] 350
Table loading capacity [kg] 300
Programming resolution [nm] 1
Scale feedback resolution [nm] 0.1
Table 4

Specification of NPFLEX

Table 4
Specifications Value
Stage range (X, Y) [mm] 300, 300
Lateral resolution [μm] 0.069
Vertical resolution [nm] ≤ 0.1
RMS repeatability [nm] 0.0041
Light source LED (Green, White)

2.1.3 측정장비

본 실험에서 설정한 가공조건에 따른 표면거칠기의 정량적인 측정을 위해 Fig. 4인 Bruker 사의 NPFLEX 백색광 간섭계를 활용하였다. 백색광 간섭계는 다양한 파장의 백색광을 통해 발생하는 간섭패턴을 이용하여 측정대상과 파동의 위상차이를 통해 3차원 높이를 구하는 원리이다.
Fig. 4

White light scanning interferometer

KSPE_2024_v41n2_111_f004.jpg
2.2 실험방법
(1)
Rmax =R-124R2-f2≒R122R-f24R=f28R
(2)
R=2×Δabcf=2f×12f2⋅Rmax2=Rmax4

f: feed rate (mm) , R: tool nose radius (mm)

시편의 경면으로 활용하기 위해 수 나노미터영역의 표면거칠기를 확보할 수 있는 DT 가공에 관한 많은 연구가 이전부터 진행되고 있으며[4-6], 가공조건에 관한 연구내용을 활용하여 가공조건을 Table 5와 같이 설정하였다.
Table 5

Experimental conditions (DT)

Table 5
Parameters Conditions
Tool rake angle [deg(o)] -35
Spindle speed [RPM] 3,500
Feed rate [mm/min] 2
Depth of cut [μm] 2
이 과정에서 활용한 공구의 인선부와 표면거칠기 산의 형상은 원호로, 선삭가공의 표면거칠기 이론식은 공구 이송속도와 노즈반경을 활용하여 최대높이 거칠기와 산술평균 거칠기로 식(1), 식(2)와 같이 나타낼 수 있다.
다이아몬드터닝 1차가공 후 2차가공인 그루빙가공 시 표면거칠기 변화에 영향을 미치는 가공변수는 Table 6의 공구의 경사각, 공구 이송속도, 절삭깊이로 설정하였고, 가공변수의 범위는 Fig. 5의 패턴가공 및 SEM, AFM 측정을 활용한 기초실험을 통해 가공진행 방향에 수직한 pitch (Y-axis)와 절삭깊이에 대한 검증과정을 통해 설정하였다.
Table 6

Experimental conditions (Grooving)

Table 6
Parameters Conditions
Tool rake angle [deg(°)] -15, -40, -65
Feed rate [mm/min] 5,000, 7,500, 10,000
Depth of cut [nm] 10, 50, 100
Fig. 5

Basic experiment measurement data (after grooving machining)

KSPE_2024_v41n2_111_f005.jpg
저마늄 단일 시편에 총 27회의 가공조건을 동일하게 적용하기 위해 Fig. 6과 같이 시편의 가공면에 수평방향으로 6°씩 C축 회전하였고, 모든 가공면의 총 가공깊이는 1 μm로 설정하여 인선부가 일자 형태인 공구로 각 조건에서 하나의 그루브 일자 패턴을 가공하였다.
Fig. 6

Sample machining & measurement point image

KSPE_2024_v41n2_111_f006.jpg
표면거칠기의 측정영역은 Fig. 6과 같이 시편의 중심부를 대칭으로 가공경로 상 진입부와 이탈부에서 존재할 수 있는 오차를 고려하여 각 2-point씩 총 4-point로 설정하여 반복측정 후 평균값으로 나타내었다.
3.1 공구 이송속도에 따른 표면거칠기
Fig. 7은 가공조건 변수 중 공구 이송속도에 따른 표면거칠기 값을 나타내었다. 공구 이송속도는 10,000 mm/min 초과 시 급속이동 모드로 전환되어 공구의 가동범위 끝 지점에서 브레이크 제어로 인하여 발생하는 진동의 영향으로 최대 범위를 10,000 mm/min로 5,000, 7,500, 10,000 (mm/min)로 설정하였다. 그 결과, 공구 경사각 -15°, 절삭깊이 10 nm를 고정으로 5,000 mm/min의 조건에서 가장 좋은 표면거칠기를 얻었고, 공구의 이송속도가 감소할수록 좋은 표면거칠기의 경향을 확인하였다. 이 과정에서 공구 이송속도의 설정 범위를 기존보다 낮은 속도로 재설정하여 표면거칠기에 대한 심층적인 경향성 분석과 가공경로 상 가공되지 않는 가속구간의 길이에 따른 표면특성분석에 대한 추가 실험 필요성을 확인하였다.
Fig. 7

Surface roughness versus feed rate

KSPE_2024_v41n2_111_f007.jpg
3.2 공구 경사각도에 따른 표면거칠기
Fig. 8은 공구의 경사각에 따른 표면거칠기 값을 나타내었다. 선삭가공의 경우 취성특성 소재의 초정밀가공 시 공구의 경사각을 음의 방향으로 조절하여 칩의 형태나 배출을 제어하고 공구에 가해지는 부하를 줄여 가공성을 개선시킨다고 연구되어 왔다[6,7].
Fig. 8

Surface roughness versus tool rake angle

KSPE_2024_v41n2_111_f008.jpg
이를, 본 실험인 직교절삭가공에 적용하여 공구 경사각이 -15, -40, -65 (°)의 다이아몬드 공구로 설정하였다. 공구 이송속도 5,000 mm/min, 절삭깊이 10 nm를 고정으로 가공 시 -65°의 공구를 사용하였을 때 가장 좋은 표면거칠기 값을 얻었으며, 공구 경사각이 음의 방향으로 커질수록 좋은 거칠기 값을 확인하였다. 이러한 결과를 통해 가공 시 공구가 받는 부하를 정량적으로 분석하기 위해 공구동력계를 활용한 추가 연구 필요성을 확인하였다.
3.3 절삭깊이에 따른 표면거칠기
Fig. 9는 가공조건 변수 중 절삭깊이에 따른 표면거칠기 값을 나타내었다. 절삭깊이의 범위는 기초실험을 통해 확인한 표면품질의 변화가 존재하는 최소단위인 10 nm를 최소로 하여, 10, 50, 100 (nm)로 설정하였고, 10 nm의 경우 100회, 50 nm는 20회, 100 nm 10회로 모든 조건의 가공깊이는 1 μm로 동일하게 가공하였다. 공구 경사각 -65°, 공구 이송속도 5,000 mm/min를 고정으로 가공 시 10 nm의 절삭깊이로 1 μm를 가공하였을 때 가장 좋은 표면거칠기 값을 얻었으며, 절삭깊이가 적을수록 좋은 표면거칠기의 경향을 확인하였다.
Fig. 9

Surface roughness versus depth of cut

KSPE_2024_v41n2_111_f009.jpg
하지만, 이러한 결과는 절삭가공의 예측가능한 일반적인 원리로 판단하여 공구의 마모를 고려한 최적 절삭깊이 조건 도출에 대한 연구의 필요성을 확인하였다.
3.4 공구 경사각에 따른 표면품질분석
Fig. 10은 Fig. 8의 가공조건인 공구 이송속도 5,000 mm/min, 절삭깊이 10 nm를 고정으로 공구 경사각에 따른 표면측정 이미지로, Figs. 10(a)의 경우 공구 경사각 -15° 공구를 사용하였고, 10(b)는 -40°의 공구, 10(c)는 -65°의 공구를 사용하였다. 그 결과, -15°와 -40°에서는 공구의 인선부와 인선부에 수직한 측면부에 Chipping 발생과 소재가 깨지는 문제로 인해 광학소자로 사용하기에는 어렵다고 판단하였고, -65°의 공구를 사용한 가공면이 -15° 공구와 -40° 공구에 비해 표면품질이 개선됨을 확인하였다.
Fig. 10

Surface image (microscopy objective_x20)

KSPE_2024_v41n2_111_f010.jpg
본 연구에서는 낮은 파괴인성과 높은 경도로 인한 취성특성의 저마늄 소재를 그레이팅 분광소자로 활용하기 위해 초정밀 패턴 가공 시 가공조건에 따른 표면특성 변화에 대한 실험을 진행하였다.
실험은 저마늄 소재에 대해 1차가공으로 초정밀 DT 가공과 공구 경사각, 공구 이송속도, 절삭깊이를 변수로 2차가공인 그루빙가공을 진행하였고, 백색광간섭계와 공구현미경을 활용하여 표면거칠기 측정과 표면품질에 대한 분석을 진행하여 다음과 같은 결론을 얻었다.
저마늄 소재의 그루빙가공 시 공구의 이송속도와 절삭깊이는 작을수록, 공구의 경사각은 음의 방향으로 클수록 좋은 표면거칠기 경향성을 확인하였고, 추가적으로 공구의 수명을 고려한 최적가공조건 도출 연구가 필요하다고 판단하였다.
가공조건 중 공구 경사각 -65°, 공구 이송속도 5,000 mm/min, 절삭깊이 10 nm의 조건에서 가장 좋은 표면거칠기인 Ra 8.0 nm와 공구현미경을 활용한 표면이미지에서 다른 실험조건에 비해 좋은 가공면의 품질을 확보하였다.
기존 연구 대비 취성특성의 저마늄 소재에 대해 그루빙가공을 활용하여 가공변수에 따른 표면품질 및 정량적인 표면거칠기의 경향에 대해 분석하였다.
추후 쐐기 기울기(Blaze Angle)가 존재하는 그레이팅 분광소자를 가공하기 위해 공구인선에 수직한 측면각을 패턴가공기의 축 제어 및 공구형상 변화를 통해 가공성을 검증하는 추가 연구의 필요성을 확인하였다.
이 논문은 2023년도 정부(과학기술정보통신부)의 재원으로 한국연구재단의 지원을 받아 수행된 연구임(NRF-2023M3C1C1A01098410, 무인이동체 원천기술개발사업).
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Joong Kyu Ham
KSPE_2024_v41n2_111_bf001.jpg
Ph. D course in the School of Mechanical Engineering, Chungnam National University. His research interest is ultra-precision machining.
Jong Gyun Kang
KSPE_2024_v41n2_111_bf002.jpg
Ph.D. candidate in the Department of Mechanical Engineering, Chungnam National University. His research interest is ultra-precision machining.
Hwan Ho Maeng
KSPE_2024_v41n2_111_bf003.jpg
Ph. D course in the School of Mechanical Engineering, Chungnam National University. His research interest is ultra-precision machining.
Seong Hyeon Park
KSPE_2024_v41n2_111_bf004.jpg
M.S. course in the Department of Mechanical Engineering, Hanbat National University. His research interest is ultra-precision machining.
Jin Yong Heo
KSPE_2024_v41n2_111_bf005.jpg
B.S. course in Department of Mechanical Materials Convergence System Engineering, Hanbat National University. His research interest is ultra-precision machining.
Young Durk Park
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Professor in Department of Mechanical Materials Convergence System Engineering, Hanbat National University. His research interest is ultra-precision machining.
Geon Hee Kim
KSPE_2024_v41n2_111_bf007.jpg
Professor in Department of Mechanical Materials Convergence System Engineering, Hanbat National University. His research interest is ultra-Precision machining.

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A Study on Pattern Machining Technology for Germanium Materials Using Grooving Machining Process
J. Korean Soc. Precis. Eng.. 2024;41(2):111-116.   Published online February 1, 2024
DOI: https://doi.org/10.7736/JKSPE.023.130
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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A Study on Pattern Machining Technology for Germanium Materials Using Grooving Machining Process
J. Korean Soc. Precis. Eng.. 2024;41(2):111-116.   Published online February 1, 2024
DOI: https://doi.org/10.7736/JKSPE.023.130
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A Study on Pattern Machining Technology for Germanium Materials Using Grooving Machining Process
Image Image Image Image Image Image Image Image Image Image
Fig. 1 Germanium (Ge) sample with machining jig
Fig. 2 Diamond turning machine
Fig. 3 Ultra-precision grooving machine
Fig. 4 White light scanning interferometer
Fig. 5 Basic experiment measurement data (after grooving machining)
Fig. 6 Sample machining & measurement point image
Fig. 7 Surface roughness versus feed rate
Fig. 8 Surface roughness versus tool rake angle
Fig. 9 Surface roughness versus depth of cut
Fig. 10 Surface image (microscopy objective_x20)

Fig. 1

Fig. 2

Fig. 3

Fig. 4

Fig. 5

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Fig. 10

A Study on Pattern Machining Technology for Germanium Materials Using Grooving Machining Process
Material properties Value
Hardness [Hv, GPa] 7.6-8.1
Flexural strength [GPa] 0.067-0.11
Fracture toughness [MPa] 0.67
Tensile strength (Ultimate) [MPa] 135
Yield strength [MPa] 135
Modulus of elasticity [GPa] 103
Thermal conductivity [W/m·K] 59.9
Specifications Value
Linear axis travel range (X, Y, Z) [mm] 350, 150, 300
Workpiece (C-axis) [RPM] 10,000
Workpiece swing capacity [mm] Ø 750
Workpiece loading capacity [kg] 102
Linear axis programming resolution [nm] 0.01
Linear axis position feedback resolution [nm] 0.01
Specifications Value
Linear axis (X, Y, Z) [mm] 400, 650, 180
Linear axis feedrate (X, Y, Z) [mm/min] 20,000, 20,000, 1,000
Table diameter [mm] 350
Table loading capacity [kg] 300
Programming resolution [nm] 1
Scale feedback resolution [nm] 0.1
Specifications Value
Stage range (X, Y) [mm] 300, 300
Lateral resolution [μm] 0.069
Vertical resolution [nm] ≤ 0.1
RMS repeatability [nm] 0.0041
Light source LED (Green, White)
Parameters Conditions
Tool rake angle [deg(o)] -35
Spindle speed [RPM] 3,500
Feed rate [mm/min] 2
Depth of cut [μm] 2
Parameters Conditions
Tool rake angle [deg(°)] -15, -40, -65
Feed rate [mm/min] 5,000, 7,500, 10,000
Depth of cut [nm] 10, 50, 100
Table 1 Material properties of germanium
Table 2 Specification of 650FG v2
Table 3 Specification of NIC-300PS5-N5
Table 4 Specification of NPFLEX
Table 5 Experimental conditions (DT)
Table 6 Experimental conditions (Grooving)

Table 1

Table 2

Table 3

Table 4

Table 5

Table 6

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