Chemical Mechanical Planarization (CMP) is an essential process for flattening the surface of the wafer to produce a fine structure. The CMP process is performed after a break-in step prior to optimizing the polishing pad. Break-in consists of the conditioning step and warming-up step. In the conditioning step, a conditioner embedded with diamonds is used to remove residues from the pad surface and manages the directionality and height deviation of asperities on the surface. The warming-up step serves to increase the temperature of the pad surface by polishing multiple wafers. The temperature in the warming-up step is raised due to friction between the wafer and pad, and the pad state is divided into a partly warmed up section, a transition section, and a fully warmed up section of the pad. In this study, as the wafer pressure increased in the warm-up stage, the time for the pad to reach the stable section was confirmed, and the break-in mechanism was analyzed in terms of surface characteristics and mechanical properties, such as surface photograph, surface roughness of the pad, and elastic modulus of pad asperities. Based on these results, the break-in mechanism that increases the material removal rate was analyzed.
Many countries are trying to overcome global warming due to greenhouse gas emissions, such as CO₂. In particular, the regulation on CO₂ emissions of internal combustion engine vehicles has become strictly important. Thus, the automobile companies are putting more effort for improving the manufacturing of the battery, which is the main power supply of electrical vehicles. In the electrode cutting process, laser cutting has been actively discussed to solve problems originating from the conventional electrode cutting processes. However, there is a lack of research considering the effect of thickness of the active material on laser cutting. In this paper, the effect of thickness of the active material on laser cutting of electrodes is analyzed. First, the cut electrodes are observed through a scanning electron microscope (SEM). Next, the kerf width and clearance width of the electrodes are measured and compared at the same laser parameter. The kerf width and clearance width of relatively thick electrodes are narrowly formed. Finally, the cutting quality of the electrode is compared. A uniform cut edge is observed as the scanning speed increases.
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Comparison of laser processability for LiFePO4 cathode material with nanosecond and femtosecond laser Jaegeun Shin, Juhee Yang, Dongkyoung Lee Journal of Science: Advanced Materials and Devices.2024; 9(3): 100753. CrossRef
In the navigation of mobile robots, the driving risk can be minimized by increasing the probability of success. The algorithm, which is currently commonly known as the shortest path algorithm, performs efficiently, but does not exhibit a good probability of success for achieving the final goal. In this paper, we develop a new reactive navigation algorithm, known as the goal guidance vector (G2V), which can minimize the driving risk within the sensing range. The G2V is designed to improve the performance of the reactive navigation algorithm using a hazard cost function (HCF) that accounts for the scale and locations of the obstacles within the sensing range. We also adopt real-time fuzzy reactive control to determine the weighting factors of the HCF in an unknown environment to determine the optimal G2V. Simulations are conducted to validate the use of this approach for various environments.
Controlling an optical sensor’s line of sight (LOS) with an inertial stabilization system carried out on a dynamic platform is a challenging engineering task. The LOS needs to track a target object accurately despite intentional maneuvers, inadvertent motions, and additional disturbances. In this study, a super-twisting sliding mode controller (STSMC) is implemented to overcome this problem. The controller is designed based on the analysis of system dynamics. The stability is then proved to be satisfactory by the Lyapunov theory. Then, the control law is validated through experimental studies. In addition, a comparison to the performance of a linear controller is derived so that the effectiveness of the proposed controller is validated.
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In ultra-precision processes, such as aerospace parts and precision mold machining, the accuracy of a feed drive system should be secured to achieve sufficient form accuracy. Dual-Servo stages, which compensate for multi-DOF motion errors, are being developed depending on the applied processes. This paper deals with the fine stage of a dual-servo stage to compensate for 6-DOF motion errors of a linear stage. The proposed fine stage measured 6-DOF errors of the linear stage motion with capacitive sensors, a reference mirror, and an optical encoder. It compensated for the errors using the flexure hinge mechanism with piezo actuators. The error equations and the inverse kinematics were derived to calculate the 6- DOF errors and displacements of piezo actuators for 6-DOF motions, respectively. Performance evaluation was implemented to verify feasibility of the developed fine stage of the fabricated dual-servo stage. Through the step response test of the fine stage, compensation resolutions for the translational and the rotational motion were confirmed to be less than 10 nm and 1/3 arcsec, respectively. The 6-DOF motion errors in the verification test were reduced by 73% on average.
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The magnetorheological material changes its characteristics according to the external magnetic field. Magnetorheological elastomer existing in the solid phase has micrometer-sized magnetically responsive particles inside. When a magnetic field is applied by a permanent magnet or electromagnet nearby, it can exhibit stiffness that changes according to the strength of the magnetic field. Many previous studies focused on verifying the variability of the material"s characteristics. However, this study newly proposed a variable stiffness joint for the suspension system of railway vehicles using a magnetorheological elastomer, as a basic study of magnetorheological elastomer for a mechanical component. Based on the characteristics test of the magnetorheological elastomer, the variable joint was designed to have the same structure as the conventional guide arm joint of a railway vehicle. Particularly, to overcome the low magnetic field strength, which may be a problem in the previous research, and to implement uniform magnetic field distribution, the electromagnet was designed to make direct contact with the magnetorheological elastomer. A mathematical model was established and a finite element method verified the model, resulting in an average magnetic flux density of 300 mT, which means 30% stiffness change at 15% shear strain.
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In recent years, the machine industry has demanded high precision of the processed products and high efficiency of production due to the rapid development of technology. The grinding machine is being studied in many countries. The typical grinding machine is processed in the order of one side each. However, a 2-head simultaneous grinding machine processes both sides at the same time. Therefore, it has reduced processing time and improved precision. In this study, the overall structural analysis of a 2-head simultaneous grinding machine with high precision and high efficiency of productivity was performed. For high precision of the 2-head simultaneous grinding machine, the spindle taper angle was analyzed and optimized. When the spindle taper angle was 16 degrees, it had the highest chucking force. Therefore, the spindle had high precision as the spindle taper had the strongest force to chuck the collet. The analysis results can be applied to further develop the 2-head simultaneous grinding machine.
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With the development of various 3D printing technologies, many studies are being conducted in the field of food printing. In particular, chocolate printing is widely used for decoration. As a result, there is a growing demand for color printing, which goes beyond conventional monochrome chocolate 3D printing. Therefore, in this study, we tried to confirm the possibility of printing a new color gradation by mixing two types of chocolates with different colors using a static mixer. For this purpose, extrusion type printer equipment consisting of extrusion parts with dual syringe, heater, and mixer, and transport parts with motors and linear guide were manufactured. Proper process conditions were achieved by changing the chocolate temperature and extrusion quantity. Through this process, the color-mixed structure was successfully printed, and it was confirmed through color-code analysis that proper mixing was achieved. Further, through the production of multi-mixed color chocolate printing structures with various shapes, structural and visual diversity was acquired.
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The need for automated material handling inside the factory has been steadily increasing, especially due to implementation of intelligent manufacturing for better productivity and product quality. Automated material handling devices include logistics robots, automated guided vehicles, industrial robots, collaborative robots, and pick-and-place devices. This study focuses on the development of a low-cost logistics robot that works effectively within a simulated smart factory environment. A nominal PID controller is implemented to guide the robot to follow the line painted on the factory floor. The tracking error information is generated by four down-facing infrared sensors and is fed into the controller. The line-following performance is significantly improved with augmentation of a model-based friction compensator. Optimization of battery power depending on the remaining charge status enhances the reliability. All hardware/software development is supported by the Arduino platform. The step-by-step movement and performance of the logistics robot is verified inside the simulated smart factory environment that includes a robot arm, three conveyors, and two processing stations.
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