This study details the development of an ultra-precision air-bearing stage that integrates real-time motion error measurement and compensation features. The motion errors addressed include horizontal and vertical straightness errors, as well as roll, pitch, and yaw errors. These errors are measured by an embedded system that incorporates five capacitive sensors and a reference mirror within the stage. A key advantage of this stage is its capability to perform real-time compensation using the internal measurement system and on-stage pneumatic regulators, eliminating the need for external measurement and compensation devices. Experimental results show a significant reduction in motion errors, with horizontal and vertical straightness errors decreasing from 3.09 and 1.95 μm to 0.29 and 0.25 μm, respectively. Additionally, roll, pitch, and yaw errors were reduced from 3.18, 3.45, and 4.93 arcsec to 0.35, 0.41, and 0.49 arcsec, respectively. These results clearly demonstrate the effectiveness of the proposed approach.
Hyo Geon Lee, Jae Woo Jung, Sang Won Jung, Jae Hyun Kim, Seonbin Lim, Youngjin Park, Jaehyun Lim, Kijun Seong, Daehee Lee, Seunggu Kang, No-Cheol Park, Jun Young Yoon
J. Korean Soc. Precis. Eng. 2026;43(2):139-149. Published online February 1, 2026
This paper presents model-based hysteresis and cross-coupling compensators designed for precise control of a piezoelectric fast steering mirror (FSM). The hysteresis compensators are developed by inversely modeling the variation in the force constant relative to various excitation voltages, enabling the system to maintain linear response characteristics across a broad range of input amplitudes. The cross-coupling compensator is formulated by creating a decoupling matrix that cancels out coupling effects, generating signals of equal magnitude and opposite phase for each axis. The implementation of these compensators reduces the hysteresis band and magnitude uncertainty in the FSM dynamics by over 89.6% and 74.2%, respectively, while also significantly suppressing cross-coupling effects by more than 85.5%. Furthermore, the performance of the proposed compensators is validated in a closed-loop control system, demonstrating a notable reduction in cross-axis vibrations and improved tracking performance in response to step reference inputs and highfrequency sinusoidal trajectories.
Most temperature indicators that use thermocouples as sensors include an internal thermometer for compensating room temperature variations. This thermometer measures ambient temperature, which is then converted to a thermoelectric voltage. This voltage is added to the electromotive force measured in the thermocouple sensor and then converted back to temperature. Although precise calibration of the indicator can be conducted in a controlled room-temperature environment, additional uncertainty arises due to room temperature compensation during actual measurements. To address this issue, we calibrated temperature indicator at the ice point. In this experiment, the indicator was placed in an environment where the temperature varied between 8 and 38oC, demonstrating its dependency on ambient temperature. In a second set of experiments, we shorted the thermocouple input terminal to verify whether the indicator correctly indicated the ambient temperature. This study proposed a method to assess additional uncertainty that must be considered when using a thermocouple connected to an indicator calibrated with an external ice point in a laboratory. It also highlights additional steps and factors to consider during the calibration of temperature indicators that employ internal temperature compensation.
In the field of construction automation, significant research efforts continue to focus on replacing human labor; however, the varied and dynamic nature of construction sites still requires human intervention. The high task intensity in construction sites, particularly in lifting heavy materials, frequently results in musculoskeletal disorders among workers. To address this issue, this paper proposes a lifting device to replace manual material transportation through an opening between floors. The lift is designed with a gear-constrained double parallelogram mechanism to enable straight vertical movement. Moreover, a crank-rocker mechanism is incorporated to improve efficiency in repetitive tasks, reduce the required driving torque, and simplify control complexity. Additionally, this study introduces a passive gravity compensation mechanism that employs springs and cables, tailored to the lifting process, to enhance payload capacity and stabilize actuation. Through the integration of these mechanisms, the necessary motor capacity and control costs are significantly reduced. The effectiveness of the device is validated by actuation experiments with a fabricated prototype.
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Here in, a high-quality automotive camera lens was developed based on an ultra-precision diamond turning core and cyclic olefin polymer (COP) injection molding process. To improve surface roughness and achieve the accuracy of plastic injection molding lens, systematic mold core machining process was developed and demonstrated using the diamond turning machine. The cutting tool path was generated by using NanoCAM 2D, and it was partly revised to prevent interference between the cutting tool and the workpiece. After the initial machining using the generated tool path, the compensation-cutting process was conducted based on the measured surface profile of an initially machined surface. After two times of compensation machining, the fabricated core mold showed a shape error of 100 nm between peak to valley (PV) and Arithmetic mean roughness (Ra) of 3.9 nm. The performance of the fabricated core was evaluated using an injection molding test. Injection molded aspheric plastic lens showed contrasts that were higher than 55% at 0.0 F, 30% at 0.3 F, and 20% at 0.7 F without any moiré phenomenon that meets the specification for automotive vision module with 1MP and 140° field of view.
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This paper presents a distortion compensation algorithm for cable-driven master devices. Such device has four string pots at four corners of a frame. Four cables are tied from the four corners to the center holder. When the central holder, which is a haptic grip, moves, lengths of the four cables will change. From the four cable lengths, the spatial position of the haptic grip can be estimated using triangulation. In this case, distortion such as barrel image of the image field occurs when estimating a position with an offset parallel to the plane in which the four string pots are located. The closer to the corner, the smaller the position estimate value is than the true value. After distortion phenomenon is modeled by projecting onto the ellipsoid, the position in the vertical direction of the cable plane is compensated by the corresponding value and flattened. The mean error in the x-direction position was improved by 91% from 0.7833±0.8381 mm to -0.0709±0.4341 mm. This cable-driven master device can be used as a haptic device for operating a surgical robot.
Self-Powered neutron detectors (SPND) detect current generated from interaction of neutron flux with emitter materials. They are inside a reactor in NPP (Nuclear Power Plant), and currently used to monitor the output and control the operation. Since the signal level of prompt-response SPND is very small (-nA), an analog circuit is necessary to amplify the current signal, and to convert it into voltage. This circuit needs to perform an anti-aliasing function to reduce distortion at the stage of digital conversion. In this paper, a systematic design process for high-gain amplification circuit is presented. Based on error analysis of the circuit, parameters are selected to satisfy design requirements. A third-order anti-aliasing filter is designed. A prototype circuit is built. Measured performance of the circuit confirms that the circuit satisfies all design requirements and validates the efficacy of the design to be used in practical environments.
Transfer robots for large-sized panels used in the display industry need to compensate for path error and reduce vibration. The iterative learning control (ILC) technique can simply compensate for the uncertainty of a control system in a repetitive motion. This study introduces an ILC compensation system applied with an accelerometer to a display panel transfer robot control system. The ILC technique was used to reduce the path error and vibration induced the flexibility of the large size robot. This method was applied to a robot system without the system model of the mechanical and measurement elements. To improve the iterative learning performance through the accelerometer, the ILC is configured by applying an acceleration element and time shift method to the PD-Offline ILC algorithm. In addition, based on the characteristics of repetitive motion, the ILC derives an acceleration data-based position estimation value. In this study, the ILC system and a large-sized panel transfer robot were implemented in MATLAB-Simulink with RECURDYN. The path errors and vibration level of the robot with a suggested ILC of 20 repeated learnings were reduced by more than 90%.
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In this study, a wire electrical discharge milling electrode was developed, and electric discharge machining characteristics were studied by using the electrode. The wire electrical discharge milling electrode is a form, in which the wire is conveyed by using a cylindrical rod with a hemispherical end as a guide, and it also rotates in one direction around the guide axis. If the wire electrical discharge milling electrode is used in electrical discharge machining (EDM), there is no need to consider electrode wear compensation. The EDM characteristics according to capacitance of the RC circuit and the rotational speed of the wire electrical discharge milling electrode were examined. The machining conditions were selected, and a hemispherical shape with good shape accuracy and fine surface finish was fabricated in two stages of roughing and finishing. By applying the wire electrical discharge milling electrode to the electric discharge milling process, straight and curved shapes were successfully machined.
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The electromagnetic force compensation (EMFC) measurement principle has been widely adopted in the high-precision mass metrology system due to its sensitive compliant mechanism and nanometer level position sensor. In EMFC, an electromagnetic actuator balances the gravitational weight to maintain zero (or Null) position by feedback control using a position sensor, and the weight is calculated from the current applied to the actuator. Thus, a position sensor in the EMFC system should measure the null position accurately with high sensitivity and resolution. The position sensor commonly used in EMFC balance is an optical sensor that measures the displacement of EMFC balance from the intensity of light coming through a slit using a two-segment photodiode. This paper analyzed the characteristics of an optical position sensor for EMFC balance through parametric analysis using the Fresnel diffraction model. We also evaluated the performance of the sensor and confirmed the feasibility from weighing performance of the balance prototype. Normalized sensitivity of the sensor was 0.04237 μm-1 and measured resolution was 1.09 nm. The weighing repeatability with our optical position sensor was 4.83 mg (1σ) at 10 g measurement, which was 3 times better than the repeatability with an alternative commercial sensor.
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We present Error Compensation Software (ECS) which uses a decic polynomial model and three-dimensional surface measurement data for the fabrication of high precision freeform mirrors. ECS is designed based on a graphic user interface that includes an error calculation mechanism and surface distribution maps, and it accepts the Ultrahigh Accurate 3D Profilometer (UA3P) measurement data of the fabricated mirror surface. It exports surface coefficients and tool paths for the Single Point Diamond Turning (SPDT) machine which allows engineers to utilize the software during the compensation process. The ECS is based on Visual C++ and runs on the Windows operating system. The error compensation process with ECS has been applied to the 90 mm diameter aluminum freeform mirrors for usage in view infrared satellites, and the root mean square and peak-to-valley surface errors were reduced from 1.52 to 0.11 μm, and from 7.05 to 1.99 μm, respectively, satisfying the requirement of the infrared camera.
In ultra-precision processes, such as aerospace parts and precision mold machining, the accuracy of a feed drive system should be secured to achieve sufficient form accuracy. Dual-Servo stages, which compensate for multi-DOF motion errors, are being developed depending on the applied processes. This paper deals with the fine stage of a dual-servo stage to compensate for 6-DOF motion errors of a linear stage. The proposed fine stage measured 6-DOF errors of the linear stage motion with capacitive sensors, a reference mirror, and an optical encoder. It compensated for the errors using the flexure hinge mechanism with piezo actuators. The error equations and the inverse kinematics were derived to calculate the 6- DOF errors and displacements of piezo actuators for 6-DOF motions, respectively. Performance evaluation was implemented to verify feasibility of the developed fine stage of the fabricated dual-servo stage. Through the step response test of the fine stage, compensation resolutions for the translational and the rotational motion were confirmed to be less than 10 nm and 1/3 arcsec, respectively. The 6-DOF motion errors in the verification test were reduced by 73% on average.
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In the framework of the 4th industrial revolution, modern machine-building rapidly converges with IOT technology. This requires very high precision machining of the parts and assemblies, such as electronics, vehicle and components, agricultural and construction machines, optical instruments, and machine tools. However, high precision machinery is quite expensive, and there exists a general need for low-cost equipment. While many researchers are working on this, their major focus is on cutting tools. This study aimed to compensate for errors and enhance machinery precision by adding a servo controller to the processing unit. Consequently, the study is on servo control and processing precision for processing utilizing ECTS (Error Compensation Tool Servo) to compensate for errors.
Recently, there has been increasing demand for flexible electronic applications such as flexible displays, foldable smartphones, and flexible batteries based on flexible substrates. The roll-to-roll additive process has attracted tremendous attention regarding manufacturing such flexible electric devices because of its characteristics of eco-friendliness, large area of compatibility, and high flexibility, in contrast to traditional lithography or vaper evaporation methods. The mass production of roll-to-roll process tension control in precision is the most crucial assignment to be achieved. For the tension control, the load cell and dancer systems are used to regulate tension disturbance. A pendulum dancer system was extensively applied for unwinder or rewinder whose span length varied in the roll-to-roll printing and coating process. However, there have been an inadequate number of studies regarding tension control using the dancer system for mass production. In this paper, we propose a mathematical model of center pivot rotary dancer system revolving dual idle rolls around the pivot. Parametric studies are conducted as a function of inertia, span length, width of substrate, and operation velocity. Additionally, an impulse response was conducted for the time domain analysis. These results can be used for the mass production of roll-to-roll additive process.
The motion platform supports the trainee in experiencing a sense of reality in virtual space by performing a motion on the available degrees of freedom for a motion that mimics a specific motion in connection with a virtual reality content or a simulator. The required specification of the motor and driver of motion platform is determined by the target specification for the upward motion of the motion plate. The reason is that the weight of the upper plate always applies gravity in the direction of the downward motion. As a result, the downward motion has an excessive specification compared to the upward motion specification, resulting in an unbalanced motion specification. Additionally, a problem may occur in which a volume increases from the application of a high specification driving unit. In this paper, the motion platform was designed capable of three-axis motion in roll, pitch, and gravity directions using a compression spring to apply a load compensation mechanism. Based on the design results, the specifications of the compression spring for motion platform to satisfy the operating specifications do not excessively move the upward and downward direction derived by the analysis.
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