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전기화학적 에칭을 이용한 텅스텐 미세 탐침 가공

인치현, 김규만, 주종남

Fabrication of Tungsten Probe using Electro-Chemical Etching

Chi Hyun In, Gyu Man Kim, Chong Nam Chu
JKSPE 2001;18(2):111-118.
Published online: February 1, 2001
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Fabrication of Tungsten Probe using Electro-Chemical Etching
J. Korean Soc. Precis. Eng.. 2001;18(2):111-118.   Published online February 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Fabrication of Tungsten Probe using Electro-Chemical Etching
J. Korean Soc. Precis. Eng.. 2001;18(2):111-118.   Published online February 1, 2001
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