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정밀 스캐너를 이용한 간섭 현미경의 가로방향 분해능 향상

박성림, 박도민, 류재욱, 권대갑

Improved Lateral Resolution of Interferometric Microscope Using Precision Scanner

Sunglim. Park, Domin. Park, Jaewook. Ryu, DaeGab. Gweon
JKSPE 1998;15(6):116-123.
Published online: June 1, 1998



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Improved Lateral Resolution of Interferometric Microscope Using Precision Scanner
J. Korean Soc. Precis. Eng.. 1998;15(6):116-123.   Published online June 1, 1998
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Improved Lateral Resolution of Interferometric Microscope Using Precision Scanner
J. Korean Soc. Precis. Eng.. 1998;15(6):116-123.   Published online June 1, 1998
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