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원거리 가스 모니터링용 분광 센서를 위한 이동반사경의 개발

배효욱1, 장한기2, 박도현1, 김호상3,#orcid

Development of Moving Mirror Assembly in the Spectroscopic Sensor for Remote Gas Monitoring

Hyo-Wook Bae1, Hankee Jang2, Do-Hyun Park1, Ho-Sang Kim3,#orcid
Journal of the Korean Society for Precision Engineering 2021;38(8):581-587.
Published online: August 1, 2021

1 무리기술

2 두산인프라코어

3 고등기술연구원

1 MOORI Technologies Co., Ltd. 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#E-mail: hoskimr@iae.re.kr, TEL: +82-31-330-7332
• Received: March 22, 2021   • Revised: May 20, 2021   • Accepted: June 10, 2021

Copyright © The Korean Society for Precision Engineering

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  • Spectroscopic sensors have been used in the field of optics and chemical analysis, and the need for remote gas monitoring in a portable form has increased. Hence, it is essential to design, manufacture, and develop a moving mirror, which that can generate the optical path difference for spectroscopic sensor. It is important to verify whether it can satisfy design requirements for the actual spectroscopic interferometer application by evaluating its performance. In this paper, a moving mirror assembly with high-speed transfer capability for a portable spectroscopic sensor is fabricated and tested. For application to a portable spectrometer, design requirements, such as moving distance, speed, and stiffness, are set and the mechanical structure, including the voice coil motor and elastic guide, satisfying these requirements is proposed. Through finite element analysis, performance of the proposed moving mirror assembly is predicted. By testing the performance after fabrication, it is verified that the proposed mirror is capable of linear movement with travel distance of several millimeters and moving speed of tens of Hz. Optical testing result shows that the proposed moving mirror can generate linear motion with a tilting error below 10 arcsecond and can be applied to the actual spectroscopic interferometer in future.
  • KEYWORDS: Remote gas monitoring, Spectroscopic sensor, Moving mirror, Tilt error, Fast steering mirror
  • KEYWORDS: 원거리 가스 모니터링, 분광 센서, 이동반사경, 틸트 오차, 고속조향경
최근 환경오염 등에 대한 경각심이 증가되면서 원거리에서 수질, 환경 등을 모니터링할 수 있는 분광 기술에 대한 수요가 높아지고 있다. 그동안 이러한 기술들은 실내에서 정량분석 용도로만 사용되어 왔으며 주변 장치의 기술 발전에 따라 실외에서 원격으로 사용할 수 있게 지속적으로 개선되고 있으며 많은 관심을 받고 있다.1 특히, 레이저와 같은 별도의 광원을 채용하지 않고 소형화된 수동형(Passive) 분광 센서(Spectroscopic Sensor)를 장착하여 원거리에서 가스 모니터링 등이 가능하도록 하는 분광 장비가 속속 등장하고 있는 실정이다.2
원거리 가스 모니터링용 분광 장비에 장착되는 분광 센서는 간섭계(Interferometer)의 형태를 가지고 있으며 적외선이 광 분할기에 의해 분할되어 고정된 반사경과 이동하는 반사경에 의해 광 경로차를 가지며 푸리에 변환(Fourier Transform)에 의해 간섭 신호를 획득한다. 이때 이동반사경(Moving Mirror)은 직선 운동을 통해 수 mm의 광 경로차를 발생시키는 역할을 수행하며 실시간 신호 획득을 위해 이동속도를 가능한 빠르게 설정할 수 있어야 한다. 또한 이러한 이동반사경을 적용함으로서 광축상으로 기울임(Tilting)이 거의 없도록 제작하여야 분광 센서의 성능을 향상시키고 실제 제품 조립 시 정렬의 용이성을 확보할 수 있게 된다.3,4 이러한 이동반사경은 마이켈슨 형태 간섭계에 기반한 위험물질의 화학 탐지 장치에 적용된 바 있으며5,6 천문우주용 대형망원경의 분광기에 적용된 사례가 있으며7 비행체의 김발 구조 내에 사용되어 조종사의 시선 조준 및 안정화에 적용되기도 하였다.8 또한 광학산업에서 고출력 레이저를 이용한 정밀 가공용 스캐너로서 적용된 바 있고,9 레이저 삼각법을 이용하는 거리 측정용 센서로도 사용되고 있는 실정이다.10
분광 센서에 사용되는 이동반사경은 이동거리, 속도, 강성 등의 요구 설계 사양을 가지며 적합한 구동 및 지지 방식을 선택하여 제작하게 된다. 대부분의 경우 이동 시 광학적인 틀어짐이 수 초 이내에 있어야 하고, 이동속도는 수십 Hz에 달하므로 고출력이며 비교적 큰 변위를 발생시킬 수 있는 보이스 코일 모터 등으로 구동되며 탄성가이드와 같이 고속의 응답 특성을 구현할 수 있는 구조물로 지지하게 된다. 또한 제작된 이동반사경이 분광 경로의 틀어짐을 얼마나 발생시키는지가 주요한 성능에 해당되게 된다.
이러한 설계 요구 조건들을 만족하는 이동 구조는 대부분 회전 모터와 이송 기구로 사용되거나,11 압전액츄에이터와 탄성가이드의 조합으로 사용되어 왔다.12 그러나 이러한 구조들은 광축의 틀어짐이나 이동거리 등을 만족하지 못하며12 이러한 문제점을 해결하기 위해 보이스 코일 모터와 볼 베어링 가이드를 조합한 구조가 사용되어 왔다.13 그러나 이러한 구조 역시 고속 운용 시 진동 발생과 광축 틀어짐 등의 요구 조건을 만족시키기에 적절하지 못한 것이 현실이다. 또한 보이스 코일 모터와 탄성가이드를 장착한 이동반사경이 간섭계 기반의 분광기에 적용되었으나 이동반사경 자체에 대한 부품 수준의 설계, 제작 방법에 대한 연구는 매우 부족하며 성능평가에 관한 연구는 부족한 실정이다.5,6,14 따라서 높은 정밀도를 요구하는 광학 분야의 이동반사경의 제작을 위한 보이스 코일 모터와 탄성가이드의 조합에 대해 해석적 기법의 적용과 성능시험 방법을 제시함으로서 관련 제품의 생산기술을 향상시키기 위한 연구가 절실한 실정이다.
본 논문에서는 원거리 가스 모니터링용 분광 센서를 위한 이동반사경을 제작하고, 성능시험을 수행하였다. 분광 센서의 요구 사양을 만족하는 이동반사경을 보이스 코일 모터와 탄성가이드를 이용하여 제작하였으며 유한요소법을 사용하여 요구 사양의 만족여부를 사전 검토하고, 제작된 이동반사경의 성능시험결과와 비교하였다. 또한 이동반사경의 틸팅 오차(Tilt Error)를 측정하여 실제 분광 센서로의 적용 가능성을 확인하였다.
본 논문의 원거리 가스 모니터링용 분광 센서는 수동형 푸리에 변환 적외선 분광 센서(Passive Fourier Transform Spectroscopic Infrared Sensor)로서 별도의 광원을 채용하지 않고, 소형의 간섭 유닛(Interferometer Unit)을 장착하여 소형 경량화의 특징을 가지며 다중 성분의 가스를 한 번에 탐지할 수 있는 특징을 가지고 있다.4 Fig. 1에 본 논문의 원거리 모니터링용 분광 센서의 구성도를 표시하였다. 분광 센서는 크게 원거리로부터의 적외선을 받아들이는 입력창(Window), 입사된 적외선을 받아 간섭신호를 발생시키는 간섭유닛, 그리고 실제 가스의 종류를 검출하는 검출유닛(Detection Unit)과 전기적인 신호의 처리를 담당하는 신호처리모듈(Signal Processing Module)과 신호처리기판(Signal Processing Board)으로 구성된다. 이 중 간섭유닛에서는 입력창(Window)을 통해 입사된 적외선을 광 분할기(Beam Splitter)를 통해 분할시켜 고정반사경(Fixed Mirror)과 이동반사경으로 보내 각각 반사된 광들을 이용하여 간섭 신호를 만들어낸다. 이때 이동반사경으로 입사된 적외선은 고속으로 이동하는 이동반사경에 의해 광 경로차를 가지게 되며, 이에 따른 간섭 무늬 신호를 발생시켜 검출모듈과 신호처리모듈을 통해 푸리에 변환에 의해 분광 신호로 변환이 이루어진다. 이러한 분광 신호는 가스의 종류와 관련 인자들을 추출하여 사용자에게 최종적인 관련 정보를 알려주는 역할을 수행한다.5
Fig. 1

Spectroscopic sensor for remote gas monitoring

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이동반사경은 이러한 분광 센서의 간섭계 내에 설치되어 광 경로상의 차이를 발생시키는 기능을 수행하는 목적으로 사용된다(Fig. 2 참조).14 특히 분광 센서에의 적용을 위해 이동반사경은 다음과 같은 설계 요구 조건을 만족해야 한다. 먼저, 이동반사경의 이동길이(Moving Distance)는 분광 센서의 분해능(Resolution)을 좌우하며 이동속도(Moving Speed)는 분광 센서의 스펙트럼 취득비율(Spectrum Acquisition Rate)과 연관되어 있다. 또한, 이동반사경의 틸트 오차는 분광 센서의 변조 효율에 영향을 미치며 틸트 오차가 작을수록 변조 효율은 커지므로 가능한 직선에 가까운 고정 밀도의 이동반사경의 기술개발이 요구된다.14 또한 최근 들어 분광 센서를 휴대용으로 사용하는 응용 사례가 늘어남에 따라 소형 경량화된 관련 부품의 제작이 요구되고 있으며 간섭계와 이동반사경의 무게는 이에 크게 작아지고 있는 추세이다. 이러한 목적들을 달성하기 위해 이동반사경은 가능한 이동길이와 이동속도는 크도록 제작하고, 틸트 오차는 가능한 작게 그리고 전체 크기는 작게 제작하는 것이 요구되고 있다. 이에 따라 원거리 가스 모니터링용 분광 센서를 위한 이동반사경의 설계 요구 사양을 Table 1과 같이 선정하였다.
Fig. 2

Operation principle of moving mirror in the interferometer unit of the spectroscopic sensor14 (Adapted from Ref. 14 on the basis of OA)

KSPE_2021_v38n8_581_f002.jpg
Table 1

Design requirements for moving mirror assembly in the spectroscopic sensor

Table 1
Moving distance [mm] 5
Moving speed [Hz] 24
Tilt error [arcsec] 10
Mirror size [mm] 20 × 3
Weight [g] 600
본 연구의 이동반사경은 Fig. 3(a)와 같이 크게 보이스 코일 모터(Voice Coil Motor, VCM)와 탄성가이드(Elastic Guide), 그리고 반사경(Reflector)으로 구성된다.
Fig. 3

Proposed moving mirror assembly for spectroscopic sensor

KSPE_2021_v38n8_581_f003.jpg
먼저, 보이스 코일 모터는 탄성가이드와 함께 반사경을 이동시키는 역할을 수행하며 가능한 소형이여야 한다. 이를 위해 이동거리 5 mm와 이동속도 24 Hz를 만족하도록 구동거리, 속도, 그리고 구동력을 선택하였으며 가능한 작은 크기의 보이스 코일 모터를 선정하였다. 선정된 모터는 미국 Moticont사의 HVCM-51-25-19(직경 51, 길이 45, 이송 거리 12.7 mm, 구동력 21.3 N)이다.
탄성가이드는 보이스 코일 모터로부터 발생하는 힘을 받아 반사경을 이동시키는 역할을 수행한다. 또한 이동 시 가능한 틸팅 오차를 최소화할 수 있어야 한다. 이를 위해 가능한 광축 방향으로의 강성은 작고, 광축에 수직인 방향으로 강성이 큰 구조물을 고려하였다. 이러한 특징을 갖는 탄성가이드로서 Fig. 3(b)와 같이 삼각형 나선형 형태의 형상을 가지는 구조를 적용하였다.15 이 구조는 보이스 코일 모터와 볼 베어링 가이드를 사용하는 구조에 비해 고속 고정밀의 구동이 가능하므로 모터 추력과 탄성가이드의 강성 계산을 통해 이동거리를 만족시킬 수 있다. 또한 반사경의 무게와 탄성가이드의 강성의 조합으로 고유진동수를 예측하여 반사경의 고속 이동을 구현할 수 있다. 틸트 오차는 횡 방향 강성이 축 방향 강성에 비해 현격히 크다는 탄성가이드의 특징을 고려하여 외곽 크기는 보이스 코일 모터에 맞추되 가능한 횡 방향 강성을 크게 하는 방향으로 설계를 진행하였다. 그리고 탄성가이드의 형상의 복잡성을 고려하여 유한요소법을 통한 강성과 최대응력 예측을 시행하여 설계 요구 조건을 만족시킬 때까지 반복해서 형상을 변경해가며 설계 작업을 진행하였다. 이러한 반복적인 과정을 통해 직경 61, 두께 0.6 mm의 삼각형 나선형 형태의 Fig. 3(b)와 같은 형상을 선정하였다.
또한 실제 탄성가이드를 보이스 코일 모터의 전후방에 배치시켜 이동반사경의 광축 방향 이동 시 틸트 오차를 최소화하고자 하였으며 나선형 형태의 탄성가이드가 가지는 비틀림 오차를 최소화하기 위하여 전 후방의 탄성가이드를 서로 반대 방향으로 배치하였다.
반사경은 실제 이동하는 질량으로서 작용되며 이동반사경의 고유진동수가 운동속도보다 충분히 크도록 크기를 선정하였다. 또한 간섭계 유닛에서 광학적인 역할을 수행할 수 있도록 반사경의 표면 및 코팅 조건을 고려하였다. 본 논문에서는 이러한 요구 조건들을 고려하여 직경 20, 두께 3 mm의 용융 석영(Fused Silica) 재질의 금(Gold) 코팅된 상용 제품을 사용하였다.
Figs. 4(a)와 4(b)는 탄성가이드에 일정한 힘을 가했을 때 발생하는 변위를 유한요소법을 적용하여 예측한 결과를 보여준다. Fig. 4(a)로부터 제안된 탄성가이드의 강성은 9.36 N/mm로 예측되며, 이는 보이스 코일 모터의 구동력 21.3 N을 고려하면 탄성가이드의 변형 2.28 mm가 발생함을 예측할 수 있다. 또한 Fig. 4(b)와 같이 유한요소해석을 수행한 결과 변위 입력 3 mm를 인가했을 때 최대응력 126 MPa의 결과를 얻었으며, 이는 탄성가이드의 재질인 티타늄 합금의 항복 응력을 고려했을 때 안전할 것으로 예측되었다.
Fig. 4

Finite element analysis result of elastic guide

KSPE_2021_v38n8_581_f004.jpg
제안된 이동반사경은 Fig. 5와 같이 위치 피드백을 위해 엔코더(Encoder)를 추가하여 제작하였다. 제작된 이동반사경의 성능시험을 위해 Fig. 6과 같이 성능시험용 테스트베드를 구성하였다. 성능시험의 목적은 이동반사경의 이동 거리, 대역 폭, 그리고 틸트 오차를 알아보기 위한 것이다. 성능시험용 테스트베드는 크게 레이저 빔을 이동반사경으로 조사하여 틸트 오차를 측정하는 오토 콜리메이터(Autocollimator), 오토 콜리메이터로부터 조사된 레이저 빔을 반사시키는 이동반사경, 이동반사경에 적합한 전류를 공급해주는 전류 증폭기(Servotronix, LVD), 이동반사경의 운동 명령을 발생시키는 제어기(DeltaTau UMAC), 그리고 제어기와 위치 명령을 제공하는 동적신호응답기(Dynamic Signal Analyzer, HP 35670), 이동반사경의 실제 위치 신호를 기록하는 PC 등으로 구성된다. 성능 실험 항목들은 제작된 이동반사경의 이동거리, 대역폭, 그리고 틸트 오차이다. Fig. 7은 제작된 시제품과 시제품을 구동하기 전류 증폭기, 제어기, 그리고 직류 전원 공급 장치를 포함하는 성능시험 장치의 사진을 보여준다.
Fig. 5

Photograph of the manufactured moving mirror assembly (Front/Rear view)

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Fig. 6

Test setup for the performance evaluation of the moving mirror assembly

KSPE_2021_v38n8_581_f006.jpg
Fig. 7

Photograph of the test bed

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먼저, 이동 거리를 측정하기 위해 이동반사경에 주파수 1 Hz의 정현파 전압을 인가했을 때 이동반사경에 장착된 엔코더를 이용하여 광축 방향 변위를 측정한 결과 이송거리 5.31 mm의 결과를 얻었으며, 요구 설계 조건인 5 mm를 상회하였음을 알 수 있었다(Fig. 8 참조). Fig. 9는 동적 변위 발생기로부터 0부터 100 Hz까지 정현파를 인가했을때 주파수 응답을 구한 결과를 나타낸다. Fig. 9와 같이 입력전압 대비 출력 변위의 비가 3 dB 감소하는 주파수가 60 Hz 부근에서 발생하여 제안된 이동반사경의 요구 설계 조건들 중 하나인 이송 속도 24 Hz를 상회하는 것으로 나타났다.
Fig. 8

Moving distance

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Fig. 9

Bode plot of moving mirror assembly

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마지막으로 오토 콜리메이터를 이용하여 이동반사경의 구동 중 틸트 오차를 측정하였다. 이동반사경의 경우 분광 센서 내에서 이동하며 광 경로가 틀어지는 것을 최소화해야 정확한 기능을 수행할 수 있다. 따라서 제작 시 발생하는 조립 오차, 환경 조건 등에 의해 발생할 수 있는 광 경로의 틀어짐을 측정하는 것이 필수적이며 이러한 목적을 위해 오토 콜리메이터를 사용하는 방법을 사용하였다. 오토 콜리메이터는 레이저의 직진성을 이용하여 광 경로의 틀어짐을 측정하는 장비로서 Fig. 10에 관련 측정 원리가 나타나 있다. 오토 콜리메이터 내의 레이저 광원(Laser Source)에서 발진된 빛은 빔 분할기(Beam Splitter), 렌즈를 거쳐 이동반사경에 도달하며 오토 콜리메이터와 이동반사경 사이의 광축이 동일하게 배치되어 있다면 이동반사경에 도달된 빛은 왔던 경로를 다시 되돌아가 광센서(Photodiode)에서 검출이 이루어지게 된다. 이때 이동반사경의 틸트 오차가 있을 때 이동반사경에 의해 반사된 빛은 다시 오토 콜리메이터로 입사하게 되고, 광센서에 의해 위치 변화가 측정된다. 이때 이동 반사경의 틸트 오차는 광센서에서 측정된 거리 변화와 비례관계에 있으므로 광센서의 변화량으로부터 이동반사경의 틸트 오차를 계산할 수 있다.
Fig. 10

Measurement of tilt error of the moving reflector by autocollimator

KSPE_2021_v38n8_581_f010.jpg
Fig. 11은 실제 구현된 오토 콜리메이터를 이용한 이동반사경의 틸트 오차 측정 사진을 보여준다. 이동반사경의 틸트 오차의 측정을 위해 오토 콜리메이터를 사용했으며, 오토 콜리메이터와 이동반사경 사이에 기준경(Reference Mirror)을 두어 기준경 대비 이동반사경이 틀어지는 각도를 측정하였다. Fig. 12는 이동반사경으로부터의 빔과 기준경에 의한 빔의 위치를 보여주는 영상을 나타낸다. Fig. 12와 같이 기준경에서 반사된 빔 영상의 직경은 약 100초에 해당되며 이동반사경에서 반사된 빔은 구동 중 움직이게 되며 이는 이동반사경의 틸트 오차에 해당된다. 따라서 Fig. 12의 영상으로부터 이동반사경에서 반사된 빔의 위치를 측정하여 실제 이동반사경의 틸트 오차값을 비례관계로부터 계산할 수 있으며 본 연구에서 제안된 이동반사경을 적용하여 측정한 결과 틸트 오차가 10초 이내에 나타나는 것을 확인하여 실제 분광 센서용으로 적용할 수 있는 가능성을 확인하였다.
Fig. 11

Photograph of autocollimator and moving reflector for the measurement of tilt error

KSPE_2021_v38n8_581_f011.jpg
Fig. 12

Measurement result of the tilt error of the moving mirror by autocollimator

KSPE_2021_v38n8_581_f012.jpg
본 연구에서 제시된 이동반사경에 대한 성능시험 결과를 Table 2에 표시하고, 설계 요구 조건과 비교하였다. 먼저, 이동반사경의 이동거리는 실험 결과 5.31 mm로서 요구 조건인 5 mm를 상회하였으며, 이는 실제 구동 시 양 끝단의 여유 부분을 고려하더라도 요구된 분광 센서의 분해능을 충분히 만족할 것으로 판단된다. 이동속도는 대역폭 60 Hz로서 분광 센서의 스펙트럼 취득 비율인 24 Hz를 위한 구동이 충분할 것으로 판단한다. 틸트 오차는 실제 분광 센서에서의 운용을 고려하여 오토 콜리메이터를 사용하여 측정하였으며, 24 Hz 구동 시 10초 이내의 틸트 오차를 나타내어 분광 센서로 적용할 수 있는 충분한 성능을 가진 것으로 판단할 수 있다.
Table 2

Comparison of performances of the moving mirror by experiment and design requirements

Table 2
Requirement Experiment
Moving distance [mm] 5 5.31
Moving speed [Hz] 24 60 (Bandwidth)
Tilt error [arcsec] 10 10
Mirror size [mm] 20 × 3 20 × 3
Weight [g] 600
본 논문에서는 원거리 가스 모니터링용 분광 센서를 위한 이동반사경의 설계, 제어, 시험 방법을 제안하였다. 실제 분광 센서 적용을 위한 소형화를 위해 이동거리, 대역폭, 틸트 오차 등의 목표 사양을 설정하고, 해당되는 탄성가이드 구조를 제안하고 실제 제작하여 성능을 시험하였다.
(1) 원거리 가스 모니터링용 분광 센서를 위한 이동반사경을 위해 2개의 탄성가이드에 의해 지지되고, 직선 운동이 가능한 보이스 코일 모터를 장착하는 기계 구조를 제안하였다.
(2) 제안된 이동반사경 시제품에 대해 유한요소해석을 수행한 결과 강성 9.36 N/mm, 최대응력 126 MPa의 결과를 얻어 목표 설계사양을 만족할 수 있을 것으로 예측되었다.
(3) 제안된 이동반사경 시제품을 제작하였으며 목표 설계 사양의 확인을 위한 PC 기반의 성능시험 장치를 제작하였다.
(4) 성능시험 결과 제안된 이동반사경이 이동거리 5.31 mm, 대역폭 60 Hz, 틸트 오차 10초 이하의 성능을 가지고 있음을 확인하였다. 이러한 결과를 토대로 제안된 이동반사경이 원거리 가스 모니터링용 분광 센서에 성공적으로 적용될 수 있을 것으로 판단한다.
본 연구는 대한민국 정부(산업통상자원부 및 방위사업청) 재원으로 민군협력진흥원에서 수행하는 민군기술협력사업의 연구비 지원으로 수행되었습니다(No. UM20405RD4).
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Hyo-Wook Bae
KSPE_2021_v38n8_581_bf001.jpg
Director in the MOORI Technologies. Co., Ltd.. His research interests are optical signal processing and FTIR-based remote sensing for chemical detection and monitoring.
Hankee Jang
KSPE_2021_v38n8_581_bf002.jpg
Head of R&D Center, TYM Corporation. His research interest is vibration system design.
Do-Hyun Park
KSPE_2021_v38n8_581_bf003.jpg
CEO in MOORI Technologies Co. Ltd.. His research interests are open-path FTIR spectroradiometry and electro-optic system including eye-safe laser, laser rangefinding and LiDAR.
Ho-Sang Kim
KSPE_2021_v38n8_581_bf004.jpg
Principal Research Engineer in the Institute for Advanced Engineering (IAE). His research interests are precision motion control and manufacturing processes.

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Development of Moving Mirror Assembly in the Spectroscopic Sensor for Remote Gas Monitoring
J. Korean Soc. Precis. Eng.. 2021;38(8):581-587.   Published online August 1, 2021
DOI: https://doi.org/10.7736/JKSPE.021.025
Download Citation

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Development of Moving Mirror Assembly in the Spectroscopic Sensor for Remote Gas Monitoring
J. Korean Soc. Precis. Eng.. 2021;38(8):581-587.   Published online August 1, 2021
DOI: https://doi.org/10.7736/JKSPE.021.025
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Development of Moving Mirror Assembly in the Spectroscopic Sensor for Remote Gas Monitoring
Image Image Image Image Image Image Image Image Image Image Image Image
Fig. 1 Spectroscopic sensor for remote gas monitoring
Fig. 2 Operation principle of moving mirror in the interferometer unit of the spectroscopic sensor14 (Adapted from Ref. 14 on the basis of OA)
Fig. 3 Proposed moving mirror assembly for spectroscopic sensor
Fig. 4 Finite element analysis result of elastic guide
Fig. 5 Photograph of the manufactured moving mirror assembly (Front/Rear view)
Fig. 6 Test setup for the performance evaluation of the moving mirror assembly
Fig. 7 Photograph of the test bed
Fig. 8 Moving distance
Fig. 9 Bode plot of moving mirror assembly
Fig. 10 Measurement of tilt error of the moving reflector by autocollimator
Fig. 11 Photograph of autocollimator and moving reflector for the measurement of tilt error
Fig. 12 Measurement result of the tilt error of the moving mirror by autocollimator

Fig. 1

Fig. 2

Fig. 3

Fig. 4

Fig. 5

Fig. 6

Fig. 7

Fig. 8

Fig. 9

Fig. 10

Fig. 11

Fig. 12

Development of Moving Mirror Assembly in the Spectroscopic Sensor for Remote Gas Monitoring
Moving distance [mm] 5
Moving speed [Hz] 24
Tilt error [arcsec] 10
Mirror size [mm] 20 × 3
Weight [g] 600
Requirement Experiment
Moving distance [mm] 5 5.31
Moving speed [Hz] 24 60 (Bandwidth)
Tilt error [arcsec] 10 10
Mirror size [mm] 20 × 3 20 × 3
Weight [g] 600
Table 1 Design requirements for moving mirror assembly in the spectroscopic sensor
Table 2 Comparison of performances of the moving mirror by experiment and design requirements

Table 1

Table 2

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