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폴리스티렌 입자 라만 분광법 증강을 위한 펨토초 레이저 기반 실리콘 기판 패터닝 기술

이상선1, 박재철2orcid

Functional Grid Patterning on Silicon Substrates via Femtosecond Laser Processing for Physically Enhanced Raman Spectroscopy of Polystyrene Particles

Sang Seon Lee1, Jae Cheol Park2orcid
JKSPE 2026;43(3):307-313. Published online: March 1, 2026
1한국생산기술연구원 에너지나노그룹
2한국생산기술연구원 목적기반모빌리티그룹

1Energy & Nano Technology Group, Korea Institute of Industrial Technology
2Purpose Built Mobility Group, Korea Institute of Industrial Technology
Corresponding author:  Jae Cheol Park, Tel: +82-62-600-6182, 
Email: jerwual@kitech.re.kr
Received: 1 September 2025   • Revised: 13 November 2025   • Accepted: 19 November 2025
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The practical application of Raman spectroscopy is often constrained by its low signal sensitivity, particularly for low-concentration liquid samples. This study introduces a straightforward platform that enhances Raman signals by physically concentrating analytes, providing an alternative to complex substrate fabrication and chemical treatments. We employed a femtosecond pulse laser to create functional micro-grid patterns on a silicon (Si) substrate. This laser process induces localized ablation and simultaneous oxidation, resulting in three-dimensional, hydrophilic microstructures of nonstoichiometric silicon oxide (SiO2-x). These grid structures effectively confine aqueous sample droplets through a pinning effect, functioning as a microwell array that traps and concentrates suspended polystyrene (PS) particles. This physical concentration mechanism achieved a notable signal enhancement, with a maximum factor of 5.2 for PS particles, without the need for sample dehydration. This work presents a simple, cost-effective, and highly reproducible alternative to conventional SERS for analyzing low-concentration liquid samples, demonstrating strong potential for integration into microfluidic systems.

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Functional Grid Patterning on Silicon Substrates via Femtosecond Laser Processing for Physically Enhanced Raman Spectroscopy of Polystyrene Particles
J. Korean Soc. Precis. Eng.. 2026;43(3):307-313.   Published online March 1, 2026
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Functional Grid Patterning on Silicon Substrates via Femtosecond Laser Processing for Physically Enhanced Raman Spectroscopy of Polystyrene Particles
J. Korean Soc. Precis. Eng.. 2026;43(3):307-313.   Published online March 1, 2026
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