Skip to main navigation Skip to main content
  • E-Submission

JKSPE : Journal of the Korean Society for Precision Engineering

OPEN ACCESS
ABOUT
BROWSE ARTICLES
EDITORIAL POLICIES
FOR CONTRIBUTORS

Page Path

10
results for

"Sputter"

Article category

Keywords

Publication year

Authors

Funded articles

"Sputter"

Specials

The Design of an Electrode Performance Evaluation Platform of Low-temperature Solid Oxide Fuel Cells for High-efficiency Biogas Energy Conversion
Sanghoon Ji, Weonjae Kim, Soyoung Baek
J. Korean Soc. Precis. Eng. 2025;42(12):1011-1020.
Published online December 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.00018
This study presents a performance evaluation platform for sputtered thin-film electrodes used in biogas-driven, low-temperature solid oxide fuel cells (SOFCs). The design considerations include electrolyte material composition and thickness, anode material composition and thickness, anode fuel composition, and cathode composition and thickness, all derived from a review of existing literature. For the electrolyte, we propose a thickness of 100 μm for the main electrolyte made of gadolinium-doped ceria (GDC) and 0.1 μm for the auxiliary electrolyte made of scandia-stabilized zirconia. In terms of anode fabrication, we suggest a material composition of Ru/Ni-Cu-GDC, with thicknesses of 1 μm for Ni-Cu-GDC and a few nanometers for Ru in the nanoporous anode. For the anode fuel supply, we recommend mole ratios of 45% to 75% CH4 and 25% to 55% CO2 to assess the impact of biogas composition on power performance. Lastly, for the cathode, we propose a material composition of Pt-Ti-samarium-doped ceria with a thickness of 100 nm for the nanoporous structure.
  • 164 View
  • 7 Download
Electrochemical Evaluation of PrOx Capping Layer in LT-SOFCs via Sputtering Process
Ji Woong Jeon, Geon Hyeop Kim, Hyeon Min Lee, Jun Geon Park, Gu Young Cho
J. Korean Soc. Precis. Eng. 2025;42(12):1003-1010.
Published online December 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.00014
Solid Oxide Fuel Cells (SOFCs) are energy conversion devices known for their significantly higher power density compared to other fuel cell types. However, their high operating temperatures pose challenges related to thermal stability. To address this, research is focusing on Low-Temperature SOFCs (LT-SOFCs), which function at lower temperatures and exhibit enhanced electrochemical performance. While various electrode materials are utilized in SOFCs, platinum (Pt) stands out for its excellent electronic conductivity and catalytic activity. Unfortunately, at the operating temperatures of SOFCs, Pt tends to agglomerate, leading to a rapid reduction in the triple phase boundary (TPB) and a subsequent decline in electrochemical reactions. In this study, LT-SOFCs were fabricated with a Praseodymium Oxide (PrOx) capping layer applied to a porous Pt cathode using sputtering, with various thicknesses achieved by adjusting the deposition time. The electrochemical performance of the LT-SOFCs was measured at 500oC. Additionally, the degradation behavior of the LT-SOFCs was assessed by applying a constant voltage of 0.5 V for 48 hours. Scanning Electron Microscopy (SEM) analysis was also conducted on the PrOx capping layer thin films under the same operating conditions.
  • 206 View
  • 11 Download
Fabrication of Yttria and Zirconia Co-sputtering Cathode Functional Layer for Low Temperature Solid Oxide Fuel Cells
Taehyeon Lee, Seungbong Oh, Davin Jeong, Soonwook Hong
J. Korean Soc. Precis. Eng. 2025;42(12):997-1002.
Published online December 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.00013
A yttria-stabilized zirconia (YSZ) cathode functional layer (CFL) was fabricated using a co-sputtering process to improve the oxygen reduction reaction (ORR) in solid oxide fuel cells (SOFCs). To optimize the yttria molar percentage and achieve a nano-granular structure with enhanced grain boundary density, the DC sputtering power for the metallic yttrium target was varied at 10, 30, and 50 W. Structural and compositional analyses were performed using scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and X-ray diffraction (XRD). The results indicated that a DC power of 30 W resulted in a well-developed grain structure with high grain boundary density and an yttria composition close to the optimal molar percentage of 8-10 mol %. Under these optimized conditions, the SOFC with the co-sputtered YSZ CFL achieved a maximum power output of 9.22 mW/cm² at 450oC, representing approximately a 43% enhancement compared to the reference cell. This highlights the significant potential of co-sputtering for future low-temperature SOFC applications.
  • 229 View
  • 6 Download
Articles
Enhanced Insertion Loss and Frequency Selectivity in SAW Devices through Tailored Ag-Ti Thin Films
Jae Cheol Park
J. Korean Soc. Precis. Eng. 2024;41(12):991-996.
Published online December 1, 2024
DOI: https://doi.org/10.7736/JKSPE.024.103
A compositional library of Ag-Ti thin films was fabricated using combinatorial RF magnetron sputtering. The films exhibited a gradual compositional gradient across the substrate, ranging from Ag-rich to Ti-rich compositions. SEM analysis revealed a uniform thickness of approximately 150 nm for all films. The relationship between composition and properties was investigated, demonstrating that increasing Ag content led to decreased resistivity and increased density. These results can be attributed to the high electrical conductivity and density of Ag. To optimize SAW device performance, a balance between resistivity and density must be achieved. While Ag-rich films offer higher electrical conductivity, they may experience reduced inverse piezoelectric effects due to increased density. Conversely, Ag-poor films may have improved inverse piezoelectric effects but reduced electrical conductivity.
  • 17 View
  • 0 Download
Trends in High Reflectance Coating Technologies for Cavity Ring-down Spectroscopy for Gas Detection
Haeng Yun Jung, June Park
J. Korean Soc. Precis. Eng. 2024;41(10):747-752.
Published online October 1, 2024
DOI: https://doi.org/10.7736/JKSPE.024.078
Cavity ring-down spectroscopy (CRDS) is an ultra-sensitive direct absorption technique that offers unique advantages compared to other spectroscopic techniques. It can measure cooperative enhanced absorption for weakly absorbing species at ultra-low concentrations. This is achieved by leveraging the concept of a stable optical cavity, which allows for an effective optical path length of several kilometers within a small physical sample length. One advantage of CRDS technology is that it is unaffected by fluctuations in the intensity of the light source. Another advantage is its applicability to the detection of atoms, molecules, and radicals in the atmosphere. Additionally, the equipment associated with this technology is compact and robust. This paper will first introduce the fundamental principles and setup of CRDS technology. It will then provide an overview of the characteristics of the fabrication equipment and the high reflectivity mirror coating process used in cavity ring-down spectroscopy.
  • 19 View
  • 1 Download
Fabrication of Platinum-Samarium Doped Ceria Composite Cathode Using Sputtering Technique
Yongchan Park, Davin Jeong, Hyeontaek Kim, Hyeongmin Kim, Soonwook Hong
J. Korean Soc. Precis. Eng. 2023;40(11):915-919.
Published online November 1, 2023
DOI: https://doi.org/10.7736/JKSPE.023.049
In this study, we successfully demonstrated a fuel cell fabrication method using a platinum-samarium-doped ceria (Pt-SDC) composite cathode, which could reduce the platinum content while maintaining the same thickness as the functional layer. The Pt-SDC composite cathode was deposited by a sputtering process in which two materials were simultaneously deposited by a co-sputtering system. Despite the decreased platinum content in the composite cathode, we achieved high performance of the fuel cell since Pt-SCD was able to form triple-phase boundaries (TPBs) not only at the interface between the cathode and the electrolyte but at the entire volumetric surface of the cathode. This composite cathode revealed that Pt-SDC could enhance the oxygen reduction reaction rate by enlarging the TPB site in the cathode. The fuel cell fabricated in this study with a composite cathode demonstrated improved performance at 1.66 times the peak power density of a pristine fuel cell.
  • 13 View
  • 0 Download
Development of Thin Film Solid Oxide Fuel Cell for Direct Use of Hydrocarbon Fuels
Gu Young Cho, Yoon Ho Lee
J. Korean Soc. Precis. Eng. 2022;39(10):773-777.
Published online October 1, 2022
DOI: https://doi.org/10.7736/JKSPE.022.039
Energy devices in modern society require high efficiency, carbon neutrality, and the capability of distributed power generation. A fuel cell is an energy conversion device, that satisfies all of these requirements. However, most fuel cells use hydrogen as a fuel, and more than half of hydrogen is currently produced through hydrocarbon reforming, resulting in significant energy loss. Additionally, the storage and supply of hydrogen require costly systems, and a large amount of energy is consumed during compression or liquidation processes. This paper develops a solid oxide fuel cell, that uses hydrocarbon directly as fuel to resolve this problem. A small amount of Ru is mixed with the Ni-based electrode, for the effective internal reforming of hydrocarbons. For rapid deposition of YSZ electrolytes, we developed a reactive sputtering process, using a DC power source. The developed thin-film solid oxide fuel cell, showed a performance of 76 mW/cm² at 500℃ using methane as fuel.
  • 11 View
  • 0 Download
Cathodic Functional Layer via Sputtering and Atomic Layer Deposition for Thin-Film Solid Oxide Fuel Cells
Jaeyoon Lee, Sanghyeok Lee, Hyeontaek Kim, Yongchan Park, Geunjin Lee, Changheon Lee, Sunggyu Choi, Soonwook Hong
J. Korean Soc. Precis. Eng. 2022;39(2):97-102.
Published online February 1, 2022
DOI: https://doi.org/10.7736/JKSPE.021.123
In this study, Yttria-stabilized zirconia (YSZ) functional layers were applied with different thin-film fabrication process such as sputtering and atomic layer deposition (ALD) to enhance oxygen reduction reaction (ORR) for solid oxide fuel cells. We confirmed that the YSZ functional layer deposited with sputtering showed relatively low grain boundary density, while the YSZ functional layer deposited with the ALD technique clearly indicated high grain boundary density through scanning electron microscopy (SEM) and X-ray diffractometry (XRD) results. The YSZ functional layer coated with the ALD technique revealed that more ORR kinetics can occur using high grain boundary density than the functional layer deposited with sputtering. The peak power density of the SOFC deposited with ALD YSZ indicates 2-folds enhancement than the pristine SOFC.
  • 18 View
  • 0 Download
Co-Sputtered Pt-Ru Catalytic Functional Layer for Direct-Methane Fueled Low Temperature Solid Oxide Fuel Cells
Hyong June Kim, Byung Chan Yang, Jaehyeong Lee, Sung Eun Jo, Geonwoo Park, Sanghoon Ji, Jihwan An
J. Korean Soc. Precis. Eng. 2022;39(2):91-95.
Published online February 1, 2022
DOI: https://doi.org/10.7736/JKSPE.021.119
Solid oxide fuel cell is a next generation energy conversion device that can efficiently convert the chemical energy of fuel into electrical energy. Fuel flexibility is one of the advantages of SOFCs over other types of fuel cells. SOFCs can operate with hydrocarbon type fuel. While nickel based composite is commonly used in direct methane fueled SOFC anode because of its great catalytic activity for methane reforming, the direct use of hydrocarbon fuels with pure Ni anode is usually insufficient for facile anode kinetics, and also deactivates the anode activity because of carbon deposition upon prolonged operation. In this report, the Ni based anodes with 20 nm thick catalytic functional layers, i.e., Pt, Ru, and Pt-Ru alloy, are fabricated by using the co-sputtering method to enhance the anode activity and power density of direct-methane SOFC operating at 500℃.

Citations

Citations to this article as recorded by  Crossref logo
  • A doped cobaltite for enhanced SOFCs fed with dry biogas
    Sebastian Vecino-Mantilla, Massimiliano Lo Faro
    Electrochimica Acta.2023; 464: 142927.     CrossRef
  • 31 View
  • 0 Download
  • Crossref
Effects of Current Collecting Methods for Polymer Bipolar Plate of Ultra-Light Polymer Electrolyte Membrane Fuel Cells
Gye Eun Jang, Young Jo Lee, Gu Young Cho
J. Korean Soc. Precis. Eng. 2022;39(2):109-114.
Published online February 1, 2022
DOI: https://doi.org/10.7736/JKSPE.021.118
In this study, polymer bipolar plates for ultra-light polymer electrolyte membrane fuel cells (PEMFCs) were fabricated. Various methods for current collecting were applied to ensure electron conductivity of the polymer bipolar plates. Direct wire contact and Ag sputter process were applied. The Ag current collecting layer fabricated by the sputter process showed a well-covered and defectless surface. After preparations of bipolar plates, the effects of current collecting methods of bipolar plates on the electrochemical properties of PEMFCs were systematically investigated. The maximum power density of PEMFCs with the Ag current collecting of layered polymer bipolar plates decreased 37.39% because of increased ohmic resistance. However, the power/weight of PEMFCs with the Ag current collecting of layered polymer bipolar plates increased 27.23% because of the dramatically reduced weight (-50.63%) of bipolar plates compared to the graphite bipolar plates. We affirm that results in this report can provide meaningful insight for portable electrochemical energy devices.

Citations

Citations to this article as recorded by  Crossref logo
  • A Study on Electrochemical Resistance Change through the Pressurization Process of MEA for PEMFC
    Ye Rim Kwon, Dong Kun Song, Ho Jun Yoo, Gye Eun Jang, Young Jo Lee, Jung Soo Kim, Ji Woong Jeon, Da hae Guem, Gu Young Cho
    Journal of the Korean Society for Precision Engineering.2023; 40(7): 539.     CrossRef
  • 23 View
  • 0 Download
  • Crossref